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SPUTTERING OF METAL OXIDE FILMS IN THE PRESENCE OF HYDROGEN AND OXYGEN
US 3,506,556 A
Filed
: 02/28/1968
Issued
: 04/14/1970
Est. Priority Date
: 02/28/1968
Status: Expired due to Term
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Current Assignee
Frank H. Gillery
,
Jean P. Pressau
Original Assignee
Frank H. Gillery
,
Jean P. Pressau
Inventors
Gillery, Frank H.
,
Pressau, Jean P.
Application Number
US04/709,055
Time in Patent Office
776 Days
Field of Search
US Class Current
204/192.29
CPC Class Codes
C23C 14/0057
using reactive gases other ...
H01B 1/00
Conductors or conductive bo...
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