CLOSED-END MACHINE FOR PROCESSING ARTICLES IN A CONTROLLED ATMOSPHERE

• US 3,521,765 A
• Filed: 10/31/1967
• Issued: 07/28/1970
• Est. Priority Date: 10/31/1967
• Status: Expired due to Term

• Current Assignee: AT&T Technologies Inc (Nokia Corporation)
• Original Assignee: Frank J. Viola, Robert K. Miller, Ronald D. Kauffman
• Inventors: Kauffman, Ronald D., Miller, Robert K., Viola, Frank J.
• Application Number:
  US04/679,383
• Time in Patent Office: 1,001 Days
• US Class Current: 414/217
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Claims