RF SPUTTERING METHOD AND SYSTEM

• US 3,528,906 A
• Filed: 06/05/1967
• Issued: 09/15/1970
• Est. Priority Date: 06/05/1967
• Status: Expired due to Term

• Current Assignee: James A. Cunningham, John H. Cash Jr
• Original Assignee: James A. Cunningham, John H. Cash Jr
• Inventors: Cash, John H. Jr., Cunningham, James A.
• Application Number:
  US04/643,613
• Time in Patent Office: 1,198 Days
• US Class Current: 204/298.06
• CPC Class Codes: H01J 37/3402 using supplementary magnetic fields
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• CPC Class Codes: H01L 23/29 characterised by the material , e.g. carbon interlayer dielectrics H01L23/5329
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Claims