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PARTICLE BEAM APPARATUS FOR SELECTIVELY FORMING AN IMAGE OF A SPECIMEN OR ITS DIFFRACTION DIAGRAM

  • US 3,560,739 A
  • Filed: 03/26/1969
  • Issued: 02/02/1971
  • Est. Priority Date: 03/26/1968
  • Status: Expired due to Term
First Claim
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1. In a particle beam device having a longitudinal optical axis, an apparatus for selectively imaging a specimen or a specimen diffraction diagram, said apparatus comprising beam generating means for issuing particle beams, means for accommodating a specimen in the path of said beams, an objective lens having a lens gap and a lens bore coaxial with said axis and having front and rear focal planes, said rear focal plane being spaced from said beam generating means a larger distance than said front focal plane, said diffraction diagram being imaged in said rear focal plane of said objective lens by the latter, a projection lens having an object plane and being disposed beyond said objective lens coaxially with said axis, and imaging means disposed beyond the specimen locality in coaxial relation to said axis, said imaging means having a separately energizable electromagnetic diffraction lens for transmitting the diffraction diagram imaged in said rear focal plane of the objective lens to said object plane of the projection lens, said diffraction lens being disposed coaxially intermediate said lens gap of the objective lens and said projection lens, said diffraction lens being further disposed within said bore of said objective lens in magnetically insulating relation thereto, said diffraction lens comprising two component lenses of respective image widths coaxially adjacent to each other for developing respective flux linkages directed along said axis in mutually opposed relation, each of said component lenses having a lens gap bisected by a midplane perpendicular to said axis, the axial distance between said midplanes being less than the image width of the component lens closest to the specimen locality.

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