ELECTROMECHANICAL TUNING APPARATUS PARTICULARLY FOR MICROELECTRONIC COMPONENTS
First Claim
1. Electromechanical tuning apparatus comprising:
- a first member of semiconductor material mounted on a support to permit vibration, said support being a unitary body of semiconductor material having a piezoelectric field effect transducer therein, a first layer of piezoelectric material on said first member;
first electrical contact means on said first layer for application of electrical signals thereto to produce mechanical stress transmitted to said first member;
a second layer of piezoelectric material on said first member spaced from said first layer, responsive to stress transmitted by said first member;
second electrical contact means on said second layer connected with said functional electronic elements for deriving an output electrical signal.
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Abstract
Tuning apparatus is described including a vibratory member on which layers of piezoelectric material are disposed for input and output transducers. The vibratory member may have a flat surface on which the piezoelectric layers are disposed making the structure amenable to fabrication by techniques used for fabrication of microelectronic components. The vibratory member may be a body of semiconductive material. In addition to acting as an electromechanical tuning element, the vibratory member, when of semiconductive material, may contain elements such as an integrated amplifier circuit for frequency selective properties without external tuning means. The vibratory member may be employed in various modes of vibration including flexural and longitudinal modes.
66 Citations
1 Claim
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1. Electromechanical tuning apparatus comprising:
- a first member of semiconductor material mounted on a support to permit vibration, said support being a unitary body of semiconductor material having a piezoelectric field effect transducer therein, a first layer of piezoelectric material on said first member;
first electrical contact means on said first layer for application of electrical signals thereto to produce mechanical stress transmitted to said first member;
a second layer of piezoelectric material on said first member spaced from said first layer, responsive to stress transmitted by said first member;
second electrical contact means on said second layer connected with said functional electronic elements for deriving an output electrical signal.
- a first member of semiconductor material mounted on a support to permit vibration, said support being a unitary body of semiconductor material having a piezoelectric field effect transducer therein, a first layer of piezoelectric material on said first member;
Specification
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Current AssigneeWilliam E. Newell
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Original AssigneeWilliam E. Newell
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InventorsNewell, William E.
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Primary Examiner(s)Saalbach, Herman Karl
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Assistant Examiner(s)Baraff, C.
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Application NumberUS04/699,835Time in Patent Office1,449 DaysField of Search333/71,72,30 310/8,8.1 332/30 317/235 340/10US Class Current333/186CPC Class CodesH03H 9/17 having a single resonator c...H03J 3/185 with varactors, i.e. voltag...
