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SINGLE INTERFEROMETER MULTIPLE AXIS LASER MEASURING SYSTEM

  • US 3,661,463 A
  • Filed: 03/05/1970
  • Issued: 05/09/1972
  • Est. Priority Date: 03/05/1970
  • Status: Expired due to Term
First Claim
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1. In a rectilinear positioning mechanism comprising a frame;

  • a plurality of members movably carried by said frame for selective independent rectilinear movement relative to one another and including first and second terminal members transversely movable relative to one another;

    a stationary angular reflector secured to said frame in fixed relationship between said terminal members;

    an interferometer secured to said first terminal member including a light source and a beam splitter operative to provide a fixed length reference light beam and a variable length measuring light beam comprising an output light beam directed along a path parallel to the path of movement of said first member and toward said angular reflector secured to said frame;

    a return reflector carried by said second terminal member operative to receive the reflectively directed output light beam from said angular reflector and reflectively return a spaced apart parallel measuring light beam toward said angular reflector and parallel to the path of movement of said second terminal member for continued return transmission along a reflectively directed return path to said interferometer carried by said first terminal member in parallel relationship to the output light beam therefrom;

    means for moving a predetermined one of said terminal members a selected distance; and

    , light beam combining means in said interferometer being operative to combine said reference beam with said reflectively returned measuring beam to produce interference fringes indicating a change in length of said measuring light beam proportional to the rectilinear movement of said members.

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