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METHOD OF DETERMINING THE SHEET RESISTANCE AND MEASURING DEVICE THEREFOR

  • US 3,735,254 A
  • Filed: 06/03/1971
  • Issued: 05/22/1973
  • Est. Priority Date: 06/06/1970
  • Status: Expired due to Term
First Claim
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1. A method of determining the sheet resistance (resistance per square) or a quantity associated with the sheet resIstance, in particular in the manufacture of a semiconductor device, in which at least four electrodes are placed at a distance form each other on a layer to be measured, said layer changing into a second layer via a rectifying junction, in particular a p-n junction, a current being conveyed between two electrodes, the voltage associated with said current being determined between two other electrodes, the sheet resistance or a quantity associated with the sheet resistance being determined from the results of the measurements, characterized in that, after arranging the electrodes on the layer to be measured, at least two such measurements are carried out with the same arrangement of the electrodes on the layer and that said measurements are carried out with a voltage difference between the two current-conveying electrodes, in which across the rectifying junction and the p-n junction, respectively, a voltage difference is formed in a range of voltages across the rectifying junction the p-n junction, respectively, in which same behaves as a substantially constant resistance, preferably near the zero point of the current-voltage characteristic, and that during the first measurement a current is conveyed through two electrodes, hereinafter termed the first pair of electrodes, while the voltage is determined between two other electrodes, hereinafter termed second pair of electrodes, and that during the second measurement four electrodes are chosen having a different distance between at least two electrodes relative to the first measurement, in which a current is conveyed through two of these electrodes, while the voltage is determined between the two remaining electrodes of said electrodes, the sheet resistance or a quantity associated therewith being determined from the results of said measurements.

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