DEVICE FOR PRODUCING TUBULAR BODIES OF SEMICONDUCTOR MATERIAL, PREFERABLY SILICON OR GERMANIUM

• US 3,746,496 A
• Filed: 02/08/1971
• Issued: 07/17/1973
• Est. Priority Date: 10/12/1970
• Status: Expired due to Term

• Current Assignee: Herbert Sandmann, Konrad Reuschel, Wolfgang Dietze
• Original Assignee: Herbert Sandmann, Konrad Reuschel, Wolfgang Dietze
• Inventors: Dietze, Wolfgang, Reuschel, Konrad, Sandmann, Herbert
• Primary Examiner(s): Kaplan, Morris
• Application Number:
  US05/113,286
• Time in Patent Office: 890 Days
• Field of Search: 164/74,46 264/81 118/48-49.5 117/16R,16A,16C,16D,107.2,228 249/134,82 425/470,438,447
• US Class Current: 425/447
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/22 characterised by the deposition of inorganic material, other than metallic material
• CPC Class Codes: C30B 25/00 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/06 Silicon
• CPC Class Codes: C30B 29/60 characterised by shape

Abstract

A device for producing tubular bodies of semiconductor material, preferably of silicon or germanium. To this end, a rod or tube shaped carrier is heated in a reaction gas for precipitating the respective semiconductor, as a result of which the jacket area of the carrier is coated with a layer of the semiconductor. Following the removal of the carrier, this semiconductor layer defines the desired tube. At least two vertical carriers of carbon material, e.g. graphite, are each held at their lower ends by an electrode, and are connected at their upper ends by a conductive bridge, preferably of carbon.

Claims

2. The device of claim 1, wherein silicon or germanium is produced and the conductive bridge is carbon.

3. The device of claim 1, wherein said coolant is hydrogen, nitrogen, or argon.

4. The device of claim 3, whereby the bridge that connects the upper ends of the carriers with each other comprises, and the direct holders of the carriers are of the same material as said carriers, the carrier being inserted with its ends into appropriate fitted recesses of said bridge.

5. The device of claim 4, wherein the upper ends of two adjacent carriers are fitted into recesses of the connecting bridge, whereby gaseous coolant, which is introduced at the lower end of the tubular carrier, emerges at the upper end of said carriers, into the reaction chamber.

6. The device of claim 4, wherein both tubular carriers are arranged concentrically to each other.

7. The device of claim 6, wherein the interspace between both concentric carriers and the tubular interior of the inside carrier is provided for flow of the coolant.

8. The device of claim 7, wherein the upper ends of both concentric carriers are interconnected by a bridge, which seals the space between both carriers and the tubular interior of the inside carrier, against the reaction chamber in the wall of the inner carrier, forming a continuous channel service for the passage of the coolant.

9. The device of claim 5, wherein the coolant employed mixes with the gases in the reaction chamber, and is removed with the same.

10. The device of claim 6, wherein tubular concentric carriers are held by electrodes formed by concentric tubes and are heatable by current flowing via said electrodes and the interconnecting bridge.