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FIELD EMISSION CATHODE STRUCTURES, DEVICES UTILIZING SUCH STRUCTURES, AND METHODS OF PRODUCING SUCH STRUCTURES

  • US 3,789,471 A
  • Filed: 01/03/1972
  • Issued: 02/05/1974
  • Est. Priority Date: 02/06/1970
  • Status: Expired due to Term
First Claim
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1. The method of manufacturing an electric field producing structure, starting with a structure which includes a pair of parallel metal electrodes insulatingly separated by a dielectric film, one of said pair of electrodes and said dielectric film both having a plurality of apertures therethrough whereby edges of said one electrode around said apertures is effectively exposed to a surface of the other of said pair of electrodes, said method comprising the steps of:

  • a. first, depositing a masking material at a shallow grazing angle on said one of said pair of electrodes thereby to provide a release layer on the said one electrode and build up a lip or mask of controlled diameter around the rim of each cavity therein;

    b. second, depositing a conductive metallic emitting material substantially perpendicular to the plane of said pair of electrodes whereby said conductive material is deposited on said second electrode within said apertures, thereby forming cylindrical pedestal-like protuberances within said apertures;

    c. third, simultaneously depositing masking material at a shallow grazing angle on said one of said pair of electrodes and depositing conductive metallic emitting material substantially perpendicular to the plane of said pair of electrodes whereby a conical emitting protuberance is formed on said pedestal-like protuberance; and

    d. four, subsequently removing all masking and said deposited conductive material from said one of said pair of electrodes.

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