THERMAL DETECTOR AND METHOD OF MAKING THE SAME
First Claim
1. A thermal detector device comprising a flat substrate having opposed surfaces and an opening in one of said surfaces, a layer of a material having a thermal resistance to the flow of heat along the plane of the layer on said one surface of the substrate and extending over said opening, and a body of a thermally sensitive material on said layer and positioned only over said opening in said substrate with the periphery of the body being spaced from the periphery of the opening.
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Accused Products
Abstract
A thermal detector includes a flat substrate of a semiconductor material having opposed surfaces and at least one opening extending through the substrate between the opposed surfaces. Electrical compositions are formed in the substrate at one of the opposed surfaces and provide a desired electrical circuit. A layer of an electrical insulating material having a thermal resistance to the flow of heat along the plane of the layer is on the one surface of the substrate and extends over the opening in the substrate. At least one body of a thermally sensitive material is on the layer and is positioned only over the opening in the substrate. The thermally sensitive body is electrically connected to the electrical components in the substrate.
43 Citations
7 Claims
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1. A thermal detector device comprising a flat substrate having opposed surfaces and an opening in one of said surfaces, a layer of a material having a thermal resistance to the flow of heat along the plane of the layer on said one surface of the substrate and extending over said opening, and a body of a thermally sensitive material on said layer and positioned only over said opening in said substrate with the periphery of the body being spaced from the periphery of the opening.
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2. A thermal detector in accordance with claim 1 in which the opening extends through said substrate from said one surface to the other surface.
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3. A thermal detector in accordance with claim 2 in which the substrate is of a single crystalline semiconductor material and the layer is of an electrical insulating material.
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4. A thermal detector in accordance with claim 3 including at least one electrical component formed in the substrate at the one surface and means electrically connecting said body to the component.
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5. A thermal detector in accordance with claim 4 in which the means electrically connecting the body to the component comprises a metal film connecting strip on the insulating layer and extending between the body and the component.
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6. A thermal detector in accordance with claim 5 including a plurality of bodies of the thermally sensitive material on said layer with each of said bodies being only over an opening in the substrate, a plurality of electrical components in the substrate at said one surface, and a separate metal film connecting strip electrically connecting each of the bodies to a separate one of the components.
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7. A thermal detector in accordance with claim 6 including a metal film interconnecting strip on said insulating layer and electrically connecting at least two of said bodies.
Specification