AUTOMATIC SLICE PROCESSING

• US 3,812,947 A
• Filed: 08/14/1972
• Issued: 05/28/1974
• Est. Priority Date: 07/29/1969
• Status: Expired due to Term

• Current Assignee: James L. Nygaard
• Original Assignee: James L. Nygaard
• Inventors: Nygaard, James L.
• Primary Examiner(s): Sroka, Edward A.
• Application Number:
  US05/280,317
• Time in Patent Office: 652 Days
• Field of Search: 198/19,232,33AB 118/8 235/151.1,172.5
• US Class Current: 198/617
• CPC Class Codes: B23Q 41/06 Features relating to organisation of working of machines
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67712 the substrate being handled substantially vertically
• CPC Class Codes: H01L 21/6776 Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette

Abstract

In an electronic component manufacturing system, slices are transported in serial fashion between a plurality of work stations. As the slices move through the system, each work station performs a separate manufacturing operation on each slice. The manufacturing operations are performed in immediate succession and within the same time interval so that the slices are processed rapidly and so that slices do not accumulate between the work stations. The slices are maintained in sequence throughout the system so that the operation of the system is more easily controlled.

Claims

1. In a method of operating an assembly line having a plurality of work stations for processing semiconductor slices, each slice having a plurality of binary coded notches on a respective edge thereof representing an individual identification number, the steps of:

a. sequentially transporting each of said semiconductor slices to a slice reading work station;

b. rotating each of said semiconductor slices relative to an energy source and sensor at said slice reading work station to generate a signal from its respective notches indicative of its individual identification number;

c. storing the signals indicative of each of said slice identification numbers in the same sequence which said slices are transported to said slice reading station;

d. individually transporting each of said slices to the remainder of said plurality of work stations; and

e. performing a control function when said sequence of slices is not maintained at said remaining work stations.

2. The method of claim 1 wherein said step of performing a control function includes terminating operation of said assembly line.