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APPARATUS AND METHOD FOR PRODUCING HIGH REGISTRATION PHOTO MASKS

  • US 3,820,894 A
  • Filed: 04/13/1972
  • Issued: 06/28/1974
  • Est. Priority Date: 12/28/1970
  • Status: Expired due to Term
First Claim
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1. A system for generating good registration exposures, said system comprising:

  • control means for providing control signals;

    a machine for providing a plurality of contact exposures of a master image means on an illumination sensitive medium in response to the control signals;

    master image means for selectively exposing the illumination sensitive medium, said master image means including a plurality of spaced apart master images for exposing a plurality of arrays of image exposures having good registration between the plurality of arrays wherein each array of image exposures corresponds to a spaced apart master image; and

    illumination sensitive medium operationally connected for receiving the selective exposures and for providing a plurality of exposure arrays each having a plurality of exposures of a corresponding spaced apart master image and each having good registration therebetween.

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