METHOD OF PRODUCING AN ARTIFICIAL DIAMOND FILM

• US 3,840,451 A
• Filed: 10/24/1972
• Issued: 10/08/1974
• Est. Priority Date: 10/28/1971
• Status: Expired due to Term

• Current Assignee: Demidov A, Golyanov V
• Original Assignee: Demidov A, Golyanov V
• Inventors: DEMIDOV A, GOLYANOV V
• Application Number:
  US05/300,350
• Time in Patent Office: 714 Days
• US Class Current: 204/192.15
• CPC Class Codes: C01B 32/25 Diamond
• CPC Class Codes: C01B 32/26 Preparation by using ultra-high pressure B01J3/06; by crystal growth C30B29/04
• CPC Class Codes: C23C 14/0611 Diamond

Abstract

1. A METHOD OF PRODUCING ARTIFICIAL DIAMOND FILMS WHICH COMPRISES SPUTTERING AT LEAST TWO GRAPHITE CATHODES SIMULTANEOUSLY BY IONS OF AN ELECTRIC DISCHARGE IN AN INERT GAS AT A PRESSURE OF ABOUT 10-7 TO 10-4 TORR, TO THEREBY FORM AT LEAST TWO ATOMIC BEAMS OF CARBON, THE INERT GAS PRESSURE BEING MAINTAINED SUCH THAT NEUTRAL CARBON ATOMS EMITTED FROM THE CATHODES REACH THE SUBSTRATE SURFACE WITHOUT COLLIDING WITH THE INERT GAS PARTICLES, SAID ATOMIC BEAMS OF CARBON BEING DEPOSITED ON SAID COMMON SOLID SUBSTRATE WITH OVERLAPPING ON THE SURFACE THEREOF TO THEREBY FORM SAID DIAMOND FILM.

Claims

1. A METHOD OF PRODUCING ARTIFICIAL DIAMOND FILMS WHICH COMPRISES SPUTTERING AT LEAST TWO GRAPHITE CATHODES SIMULTANEOUSLY BY IONS OF AN ELECTRIC DISCHARGE IN AN INERT GAS AT A PRESSURE OF ABOUT 10-7 TO 10-4 TORR, TO THEREBY FORM AT LEAST TWO ATOMIC BEAMS OF CARBON, THE INERT GAS PRESSURE BEING MAINTAINED SUCH THAT NEUTRAL CARBON ATOMS EMITTED FROM THE CATHODES REACH THE SUBSTRATE SURFACE WITHOUT COLLIDING WITH THE INERT GAS PARTICLES, SAID ATOMIC BEAMS OF CARBON BEING DEPOSITED ON SAID COMMON SOLID SUBSTRATE WITH OVERLAPPING ON THE SURFACE THEREOF TO THEREBY FORM SAID DIAMOND FILM.