×

Ellipsometer

  • US 3,874,797 A
  • Filed: 04/05/1974
  • Issued: 04/01/1975
  • Est. Priority Date: 04/13/1973
  • Status: Expired due to Term
First Claim
Patent Images

1. An ellipsometer for measuring the thickness, optical constant or the like of a sample from the polarization with which light impinging on the surface of the sample is reflected therefrom, said ellipsometer comprising:

  • a polarizing optical system disposed on an optical axis substantially perpendicular to the surface of the sample to be measured and for providing an emergence of elliptical polarized light;

    a first optical path changing total reflection prism for imparting a phase skip difference to the elliptical polarized light emergent from said polarizing optical system and for totally reflecting said polarized light to deflect the path thereof to cause it to impinge obliquely on said sample surface;

    a second optical path changing total reflection prism for imparting a phase skip difference to said light reflected by said surface of the sample and for totally reflecting said reflected light to deflect the path thereof to cause it to be substantially parallel to the optical axis of said polarizing optical system; and

    an analyzer for extinguishing the light passed through said second total reflection prism.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×