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Sputter-coating of glass sheets or other substrates

  • US 3,945,903 A
  • Filed: 08/28/1974
  • Issued: 03/23/1976
  • Est. Priority Date: 08/28/1974
  • Status: Expired due to Term
First Claim
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1. In combination with apparatus for sputter-coating a thin film of metal on a glass sheet substrate including a coating chamber, sputter-coating means mounted in the upper portion of said chamber, a metal platen having a major upper supporting surface, and means for conveying the metal platen into, through and out of said coating chamber, the improvement which consists (of) in providing an overlay for the metal platen formed of a (siliceous material) single plate of glass freely supported on and completely covering the upper major supporting surface of the platen in contact therewith and (directly supporting thereon) adapted to freely support the glass sheet substrate thereon and in contact therewith during the sputter-coating (operation) of the upper surface of the glass sheet substrate.

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