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Device for measuring pressure

  • US 3,946,724 A
  • Filed: 04/01/1974
  • Issued: 03/30/1976
  • Est. Priority Date: 04/09/1973
  • Status: Expired due to Term
First Claim
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1. A device for measuring pressure of a medium comprising:

  • a chip of semiconducting material whereon an integrated circuit including at least one field effect transistor sensitive to deformation is formed;

    means for defining a chamber housing said chip and impervious to said medium the pressure of which is to be measured relatively to that within said chamber, said chamber defining means including;

    a casing, a fixed support integrally secured to said casing and fixedly carrying one end of said chip, a mandrel-shaped hollow guide member having a central opening and one end tightly secured to said casing so as to locate one end of said central opening adjacent the other, free end of said chip, and a resilient membrane stretched across and secured to the other end of said hollow guide member for imperviously covering the other end of said central opening; and

    a rod-shaped core freely movably inserted inside said central opening having ends respectively in unattached contact with said membrane and said other, free end of said chip for transmitting the deformations of said membrane under pressure to said chip by axial displacements of said core.

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