Pressure transducers
First Claim
1. A pressure transducer comprising a metal diaphragm for deflection by the pressure being measured or monitored, a coating of ceramic insulating material on one surface of said diaphragm, said planar electrode on said coating being electrically isolated from said diaphragm by said coating, and a support plate of insulating material facing said one surface and spaced therefrom, said plate carrying on its surface facing the diaphragm a pair of mutually isolated planar electrodes, the three electrodes together constituting a differential capacitor.
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Accused Products
Abstract
The transducer comprises a diaphragm to which the pressure to be measured or monitored is applied to cause deflection. An electrode is formed on one surface of the diaphragm and this electrode forms a differential capacitor in conjunction with a further pair of electrodes mounted on a fixed support plate adjacent the diaphragm. Deflection of the diaphragm causes imbalance of the capacitor to a degree dependent on the deflection.
82 Citations
6 Claims
- 1. A pressure transducer comprising a metal diaphragm for deflection by the pressure being measured or monitored, a coating of ceramic insulating material on one surface of said diaphragm, said planar electrode on said coating being electrically isolated from said diaphragm by said coating, and a support plate of insulating material facing said one surface and spaced therefrom, said plate carrying on its surface facing the diaphragm a pair of mutually isolated planar electrodes, the three electrodes together constituting a differential capacitor.
Specification