Infrared radiation modulator

• US 3,955,880 A
• Filed: 07/15/1974
• Issued: 05/11/1976
• Est. Priority Date: 07/20/1973
• Status: Expired due to Term

• Current Assignee: Organisation Europeenne de Recherches Spatiales
• Original Assignee: Organisation Europeenne de Recherches Spatiales
• Inventors: Lierke, Ernst-Gunther
• Primary Examiner(s): McGraw, Vincent P.
• Application Number:
  US05/488,469
• Time in Patent Office: 666 Days
• Field of Search: 350/160 R, 350/162, 356/112, 356/106 IS
• US Class Current: 359/291
• CPC Class Codes: G02F 1/21 by interference

Abstract

An infrared radiation modulator comprising three parallely arranged interferometer plates, forming two successive slits or cavities therebetween for passing the infrared radiation to be modulated. The width of said slits is periodically varied by the oscillations of the central interferometer plate while the two outer plates remain stationary, a positive variation of the width of one of the slits corresponding at any time to a negative variation of the width of the other slit. A particularly suitable material for the interferometer plates is monocrystalline doped cadmium telluride having a high resistivity and a limited absorption rate for infrared radiation. A very precise alignment of the interferometer plates and an accurate adjustment of the width of the slits therebetween can be achieved by using a wedge-arrangement comprising three radially displaceable wedges disposed at angles of 120° for adjusting the parallelism of the plates and the width of the slits formed between the central plate and the two outer plates when in their normal (rest) position, said adjustment being made independently for each slit. In a particular embodiment, the interferometer plates are made of a material having a high resistance and having marginal zones overlaid with metal layers forming in each slit three uniformly distributed capacitors. By varying the capacitance of said capacitors the width of the interferometric slits or the parallelism of the plates can be adjusted.

Claims

1. An infrared radiation modulator comprising three parallely arranged interferometer plates made of a material having a limited absorption rate in the wavelength region of the radiation to be modulated, said interferometer plates forming two successive interferometric slits therebetween for passing the radiation to be modulated, the two outer plates of said three interferometer plates being stationary, and the central plate being suspended to a flexural resonator such that the width of said slits is periodically varied, the interferometer plates being comprised of monocrystalline doped cadmium telluride (CdTe) having a high resistivity and a limited absorption rate for infrared radiation.

2. The infrared radiation modulator of claim 1, wherein the interferometer plates have the shape of circular discs and the modulator comprises three radially displaceable wedges disposed at angles of 120°

for adjusting the parallelism of the plates and the width of the slits formed between the central plate and the two outer plates when in their normal (rest) position, said adjustment being made independently for each slit.

3. The infrared radiation modulator of claim 1, wherein the interferometer plates have the shape of circular discs and are made of a material having a high resistance, said plates having marginal zones which are out of the path of the incident radiation, said marginal zones being overlaid with metal layers forming three uniformly distributed capacitors in each interferometric slit, the variation of the capacitance of said capacitors serving to adjust the width of said slits or the parallelism of said plates.

4. The infrared radiation modulator of claim 3, wherein the inner surfaces of said interferometer plates in said marginal zones are overlaid with layers of an electrically conductive material deposited by vacuum vaporization, and wherein there is provided means to apply a static and an alternating voltage to the conductive layers of one of said interferometric slits, to capacitively produce the excitation of the resonance of said flexural resonator, and means to apply a static bias potential to said layers of the other plate to establish a feedback voltage.

5. The infrared radiation modulator of claim 4, wherein at least one of said conductive layers in each slit, in the marginal zone of said central interferometer plate is subdivided into three segments having identical areas, said segments being disposed at angles of 120°

and are usable as capacitors for adjusting the position of the interferometer plates.

6. The infrared radiation modulator of claim 1, wherein one or both outer surfaces of the interferometer plates have a vaporized filter layer thereon for the range of wavelengths of the radiation to be modulated.

7. An infrared radiation modulator comprising a frame, three parallely arranged inteferometer plates made of a material having a limited absorption rate in the wave-length region of the radiation to be modulated, said interferometer plates forming therebetween two successive interferometric gaps adapted for passing the radiation to be modulated, the two outer plates of said three interferometer plates being fixedly connected to the frame, the central plate being connected to the frame through a flexural resonant vibrator having a resonance frequency, and driving means to cause said resonant vibrator to vibrate at resonance frequency, thereby to cause the gaps to be periodically varied at said resonance frequency.

8. The infrared radiation modulator of claim 7, wherein the interferometer plates are comprised of monocrystalline doped cadmium telluride (CdTe) having a high resistivity and a limited absorption rate for infrared radiation.

9. The infrared radiation modulator of claim 7, wherein the interferometer plates have the shape of circular discs and the modulator comprises three radially displaceable wedges disposed at angels of 120°

for adjusting the parallelism of the plates and the width of the gaps formed between the central plate and the two outer plates when in their normal (rest) position, said adjustment being made independently for each gap.

10. The infrared radiation modulator of claim 7, wherein the interferometer plates have the shape of circular discs and are made of a material having a high resistance, said plates having marginal zones which are out of the path of the incident radiation, said marginal zones being overlaid with metal layers forming three uniformly distributed capacitors in each interferometric gap, the variation of the capacitance of said capacitors serving to adjust the width of said gaps or the parallelism of said plates.

11. The infrared radiation modulator of claim 10, wherein the inner surfaces of said interferometer plates in said marginal zones are overlaid with layers of an electrically conductive material deposited by vacuum vaporization, and wherein said driving means comprise means to apply a static and an alternating voltage to the conductive layers of one of said interferometer plates, to capacitively produce the excitation of the resonant vibration of said flexural vibrator, and means to apply a static bias potential to said layers of the other plate to establish a feedback voltage.

12. The infrared radiation modulator of claim 11, wherein at least one of said conductive layers in each gap, in the marginal zone of said central interferometer plate is subdivided into three segments having identical areas, said segments being disposed at angles of 120°

and are usable as capacitors for adjusting the positions of the interferometer plates.

13. The infrared radiation modulator of claim 7, wherein one or both outer surfaces of the interferometer plates have a vaporized filter layer thereon for the range of wavelengths of the radiation to be modulated.