Compensated pressure transducer
First Claim
Patent Images
1. A transducer comprising first and second stress force sensing deflection diaphragms mounted in face-to-face relationship for deflection thereof by application thereto of first and second stress forces, the diaphragms having edges in sealing engagement, one of the diaphragms having a recessed deflection surface;
- means for maintaining zero pressure differential across one of said diaphragms; and
signal means electrically coupled with said diaphragms for providing an electrical output related to the deflection of one of said diaphragms to said second stress force, electrical output related to the deflection of said one of said diaphragms to said first stress force being substantially prevented by the deflection of the other of said diaphragms to said first stress force.
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Abstract
A pair of diaphragms with substantially equal natural frequencies are superposed for movement in phase and in unison under accelerating forces, with electrical capacitor plates deposited on adjacent surfaces which provide an electrical measure of the differential diaphragm stressing with one of the diaphragms subject to a fluid pressure differential.
51 Citations
13 Claims
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1. A transducer comprising first and second stress force sensing deflection diaphragms mounted in face-to-face relationship for deflection thereof by application thereto of first and second stress forces, the diaphragms having edges in sealing engagement, one of the diaphragms having a recessed deflection surface;
- means for maintaining zero pressure differential across one of said diaphragms; and
signal means electrically coupled with said diaphragms for providing an electrical output related to the deflection of one of said diaphragms to said second stress force, electrical output related to the deflection of said one of said diaphragms to said first stress force being substantially prevented by the deflection of the other of said diaphragms to said first stress force. - View Dependent Claims (2)
- means for maintaining zero pressure differential across one of said diaphragms; and
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3. A transducer comprising first and second stress force sensing deflection diaphragms disposed in face-to-face relationship;
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
means for maintaining zero pressure differential across one of said diaphragms, and signal means comprising first and second capacitor electrode elements disposed on said diaphragms in face-to-face relationship, a dielectric medium disposed between said capacitor electrode elements, and an inductance coil coupled with said capacitor electrode elements to form a tank circuit for providing an electrical output related to the deflection of one of said diaphragms to said second stress force, electrical outputs related to the deflection of said one of said diaphragms to said first stress force being substantially prevented by the deflection of the other of said diaphragms to said first stress force. - View Dependent Claims (4)
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
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5. A transducer comprising first and second stress force sensing deflection diaphragms disposed in face-to-face relationship;
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
means for maintaining zero pressure differential across one of said diaphragms; and
signal means comprising first and second capacitor electrode elements disposed on said diaphragms in face-to-face relationship and a third capacitor element disposed on one of said diaphragms in side-by-side relationship to one of said capacitor elements and in face-to-face relationship to said other capacitor element, each of the capacitor electrode elements being movable with its respective diaphragm, and a dielectric medium disposed between said capacitor electrode elements for providing an electrical output related to the deflection of one of said diaphragms to said second stress force, electrical output related to the deflection of said one of said diaphragms to said first stress force being substantially prevented by the deflection of the other of said diaphragms to said first stress force. - View Dependent Claims (6, 7, 8, 9)
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
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10. A transducer comprising first and second stress force sensing deflection diaphragms disposed in face-to-face relationship;
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
means for maintaining zero pressure differential across one of said diaphragms; and
signal means comprising first and second capacitor electrode elements disposed on said diaphragms in face-to-face relationship, each of the capacitor electrode elements being movable with its respective diaphragm, a dielectric medium disposed between said capacitor electrode elements, an inductance coil, a cup-like transducer housing disposed about said coil and joined therewith, said housing being further joined to said means mounting said diaphragms, and means for electrically coupling said coil to said capacitor electrode elements to form a tank circuit for providing an electrical output related to the deflection of one of said diaphragms to said second stress force, electrical output related to the deflection of said one of said diaphragms to said first stress force being substantially prevented by the deflection of the other of said diaphragms to said first stress force. - View Dependent Claims (11, 12, 13)
- means mounting said diaphragms for deflection thereof by application thereto of first and second stress forces;
Specification