Pressure transducer

• US 3,968,466 A
• Filed: 10/09/1974
• Issued: 07/06/1976
• Est. Priority Date: 10/09/1973
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho (Toyota Motor Corporation)
• Original Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho (Toyota Motor Corporation)
• Inventors: Nakamura, Hiroshi, Tsukada, Kouji, Sugiyama, Susum
• Primary Examiner(s): Albritton, C. L.
• Application Number:
  US05/513,301
• Time in Patent Office: 636 Days
• Field of Search: 338/2, 338/4, 338/5, 338/36, 338/42, 73/88.5 SD, 73/398 AR, 357/26
• US Class Current: 338/42
• CPC Class Codes: G01L 19/0061 Electrical connection means
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm

Abstract

A pressure transducer includes a semiconductor diaphragm of a predetermined conductivity having a strain sensitive region capable of being elastically deformed by means of the external pressure applied thereto, a fixing region having a high degree of rigidity, central and peripheral strain sensitive elements disposed along the crystallographic directions thereof and exhibiting high sensitivity and which are respectively insulatingly disposed within the vicinity of the central and peripheral portions of the strain sensitive region of the diaphragm, lead portions insulatingly disposed upon the diaphragm and extending from the strain sensitive region to one side of an end portion in the fixing region for transmitting electrical signals from the sensitive elements, the leads being connected to the central and peripheral strain sensitive elements at one end thereof in order to collectively form a bridge circuit, and electrodes respectively provided upon the other end portions of the lead portions and within the end portion of the fixing region. A supporting member includes a supporting portion for supporting the semiconductor diaphragm through means of the fixing region of the diaphragm, and a leading portion for conducting the electrical signals therethrough, lead wires being connected to the electrodes of the lead portions and being passed through the leading portion of the supporting member. The pressure transducer transmits the electrical signals detected by means of the strain sensitive elements to the electrodes by means of the lead portions and in turn conducts the electrical signals through the lead wires to the processing apparatus. As the pressure transducer does not require internal space for connecting the lead wires to the strain sensitive elements, the pressure transducer is extremely thin and compact and is suitable for mass-production.

Claims

1. A pressure transducer comprising:

a semiconductor diaphragm having a predetermined conductivity and including a strain sensitive region adapted to be elastically deformed by means of pressure applied thereto and a fixing region;

strain sensitive elements insulatingly disposed upon said diaphragm and relative to the crystallographic directions of said diaphragm so as to exhibit high sensitivity and within the vicinity of the central and peripheral portions of said strain sensitive region;

lead portions, for transmitting electrical signals, insulatingly mounted upon said diaphrahm and extending from said strain sensitive region to one side of an end portion in said fixing region for electrically interconnecting said central and peripheral strain sensitive elements in order to form a bridge circuit which includes said central and outer strain sensitive elements and said lead portions;

electrodes respectively provided upon said lead portions within said one side of the end portion in said fixing region;

a supporting member including a supporting portion for supporting said semiconductor diaphragm by means of said fixing region of said diaphragm and a leading portion for conducting said electrical signals therethrough; and

lead wires, connected to said electrodes and to external processing apparatus, disposed within and through said leading portion of said supporting member.

whereby said electrical signals detected by means of said strain sensitive elements are conducted to said electrodes by said lead portions and further conducted outwardly of said transducer by said lead wires.

2. A pressure transducer as set forth in claim 1, wherein said strain sensitive elements comprise:

strip type members of a semiconductor crystal of a conductivity type which is opposite to that of said semiconductor diaphragm.

3. A pressure transducer as set forth in claim 1, wherein said strain sensitive elements comprise:

strip type members of a semiconductor crystal of a conductivity type which is the same as that of said semiconductor diaphragm yet having a resistivity of no more than one thousandth of that of said semiconductor diaphragm.

4. A pressure transducer as set forth in claim 1, wherein said lead portions comprise:

aluminum evaporation films disposed upon said strain sensitive and fixing regions of said diaphragm.

5. A prsssure transducer as set forth in claim 1, wherein said lead portions comprise:

semiconductor crystal layers of a conductivity type which is opposite to that of said diaphragm and which have areas which are substantially larger than the areas of said strain sensitive elements.

6. A pressure transducer as set forth in claim 1, wherein said supporting member comprises:

a plate member having a countersunk recess provided within a portion thereof which corresponds to said strain sensitive region of said diaphragm and which has a configuration and area which is the same as that of said strain sensitive region of said diaphragm.

7. A pressure transducer as set forth in claim 1, wherein said leading portion of said supporting member comprises:

an opening provided within said supporting portion which corresponds to the location of said electrodes of said diaphragm and a cut-away portion provided within an end face of said supporting member.

whereby said lead wires may be connected to said electrodes within said opening of said leading part and may be led out of said supporting member through said cut-away portion of said leading portion.

8. A pressure transducer as set forth in claim 1, further comprising:

a holding member secured to said supporting member of reinforcing said supporting member and for mounting hookup terminals thereto so as to fix said lead wires thereon.

9. A pressure transducer as set forth in claim 1, wherein said diaphragm further comprises:

a light shield coating deposited upon the entire expanse of the exposed surface of said diaphragm for preventing the transmission of direct light beams to said diaphragm.

10. A pressure transducer as set forth in claim 1, wherein:

said diaphragm is a thin plate which includes said strain sensitive region which is adapted to be elastically strained as a result of said external pressure being applied thereto and which converts said elastic strain thus produced into an electrical signal, and said fixing or attaching region surrounding said strain sensitive region, said thin plate being fabricated of a semiconductor signal crystal material of a predetermined conductivity type and said strain sensitive region of the diaphragm being circular in form and the thickness thereof being thinner than that of said fixing region of said diaphragm, a layer integrally formed upon one surface of said strain sensitive and fixing regions and having electrical insulating characteristics different from said semiconductor single crystal material of said diaphragm in that said layer is of a different conductivity type than that of said semiconductor single crystal material of said diaphragm and a resistivity of no more than one thousandth of the resistivity of said semiconductor single crystal material of said diaphragm, and further being of such a predetermined pattern which includes said semiconductor strain sensitive elements so as to convert a strain produced therewithin into an electrical signal according to a piezoresistive effect when an external pressure is exerted upon said strain sensitive region, at least one pair of said strain sensitive elements being disposed within a central portion of said strain sensitive region and of which the longitudinal directions are disposed relative to said crystallographic directions so as to present the maximum sensitivity therefor while at least one other pair of said strain sensitive elements, disposed in a circumferential portion of said strain sensitive region and of which the longitudinal directions also disposed relative to said crystallographic directions so as to present maximum sensitivity, are also disposed symmetrically with respect to the center line of said strain sensitive region which is parallel with said longitudinal directions of said central elements, and lead portions having a small resistance one end of which is respectively connected to one of said strain sensitive elements and the other end thereof is extended into said fixing region to said supporting member and which include electrodes which are positioned close to one another;

said supporting member being attached to said fixing region in such a manner that said strain sensitive region may be subjected to a pressure to be measured and being made of a material having substantially the same coefficient of thermal expansion as that of the material of said diaphragm, and which has a countersunk recess of a configuration and area which corresponds to those of said strain sensitive region of said diaphragm, a flat supporting part to be in contact with said fixing region of said diaphragm, and a leading part provided at the end portion of said supporting member which includes an opening provided within a portion thereof which corresponds to the portion of said electrodes disposed upon said lead portions of said diaphragm and through which said lead wires may be conducted outwardly of said transducer; and

said lead wires for conducting outwardly said electrical signals being respectively connected at one end thereof to said electrodes of said lead portions on said diaphragm and disposed within said opening of said leading part of said supporting member and at the other end thereof to a signal processing circuit positioned externally of said transducer through hookup terminals positioned upon a holding member for reinforcing said supporting member.

11. A pressure transducer as set forth in claim 2, further comprising:

a holding member attached to said supporting member for reinforcing said supporting member and mounting hookup terminals thereon so as to fix said lead wires thereon.

12. A pressure transducer as set forth in claim 2, wherein said lead portions comprise:

aluminum evaporation films provided upon said strain sensitive and fixing regions of said diaphragm.

13. A pressure transducer as set forth in claim 2, wherein said lead portions comprise:

semiconductor crystal layers of a conductivity type which is opposite to that of said diaphragm and which include areas which are substantially larger than those of said strain sensitive elements.

14. A pressure transducer as set forth in claim 12, wherein:

said supporting member is a plate having a countersunk recess provided within a portion thereof which corresponds to said strain sensitive region of said diaphragm and which has the same configuration and area as that of said strain sensitive region;

said lead part of said supporting member includes an opening provided within a portion of said supporting part which corresponds to said electrodes of said diaphragm and a cut-away portion provided within one end face of said supporting member, said lead wires thereby being connected to said electrodes within said opening of said leading part and being led out therefrom through said cut-away portion thereof

a holding member is secured to said supporting member for reinforcing said supporting member and for mounting hookup terminals thereon so as to fix said lead wires thereon; and

said hookup terminals are mounted upon said holding member for connecting said lead wires connected to said electrodes to processing circuitry whereby said electrical signals are conducted externally from said transducer.

15. A pressure transducer as set forth in claim 14, wherein:

said semiconductor diaphragm has an arcuate portion and a rectangular portion and is of an N type silicon signal crystal of which the crystallographic plane is the (110) plane;

said strain sensitive region has a circular configuration and is formed so as to have a smaller thickness than said fixing region, by an etching method;

said strain sensitive elements are formed of a P type silicon layer by a mask diffusion method, said central strain sensitive elements including two elements disposed along the [110] crystallographic direction and said outer strain sensitive elements includes two elements disposed along the [111] and [111] directions respectively;

said lead portions include P type silicon layers similar to that of said strain sensitive elements and have a predetermined pattern which is integrally formed upon said diaphragm, oxide films formed upon said P type silicon layers, and aluminum films which are formed upon said oxide films by a vacuum evaporation method, and are ohmically connected to said strain sensitive elements at one end thereof while the other end of said lead portions are collectively disposed at one end of said rectangaular portion of said diaphragm;

said electrodes being formed of aluminum films and provided upon said other ends of said lead portions by a bonding method;

said supporting member is a plate of crystallized glass having the same shape as that of said diaphragm and including said countersunk recess having a circular configuration similar to that of said strain sensitive region of said diaphragm and disposed within said arcuate portion of said diaphragm, said opening of said leading part being disposed at a position corresponding to said electrodes of said diaphragm disposed upon said rectangular portion, and said cut-away portion thereof being disposed within a side surface of said rectangular portion and which is connected to said opening, a beam portion being formed by said cut-away portion;

said holding member includes a plate having an arcuate portion having the same shape as that of said supporting member and a tail portion the width of which is gradually reduced;

said hookup terminals include five copper foils having a rectangular confugration and disposed upon said tail portion of said holding plate;

said lead wires include gold wires which are ohmically connected to said electrodes and said hookup terminals and are fixed to said beam portion of said supporting member at the intermediate portion thereof, and lead wires which are electrically connected to said hookup terminals and to a measurement circuit and which are covered by means fixed to said holding plate at the end portion of said tail portion thereof; and

an insluating material of a silicon rubber is provided for imparting electrical insulation, which material covers the exposed portions of said gold and lead wires.

16. A pressure transducer as set forth in claim 14, wherein said diaphragm further comprises:

light shield means for coating the exposed surface of said diaphragm for preventing the transmission of direct light beams to said diaphragm.

17. A pressure transducer as set forth in claim 16, wherein:

said semiconductor diaphragm has an arcuate portion and a rectangular portion and is of an N type silicon crystal of which the crystallographic plane is the (110) plane;

said strain sensitive region has a circular configuration and is formed so as to have a smaller thickness than said fixing region, by an etching method;

said strain sensitive elements are formed of a P type silicon layer by a mask diffusion method, said central strain sensitive elements including two elements disposed along the [110] crystallographic direction and said outer strain sensitive elements includes two elements disposed along the [111] and [111] directions, respectively;

said lead portions include P type silicon layers similar to that of said stain sensitive elements and have a predetermined pattern which is integrally formed upon said diaphragm, oxide films formed upon said P type silicon layers, and aluminum films which are formed upon said oxide films by a vacuum evaporation method, and are ohmically connected to said strain sensitive elements at one end thereof while the other end of said lead portions are collectively disposed at one end of said rectangular portion of said diaphragm;

said electrodes being formed of aluminum films and provided upon said other ends of said lead portions by a bonding material;

said supporting member is a plate of crystallized glass having the same shape as that of said diaphragm and including said countersunk recess having a circular configuration similar to that of said strain sensitive region of said diaphragm and disposed within said arcuate portion of said diaphragm, said opening of said leading part being disposed at a position corresponding to said electrodes of said diaphragm disposed upon said rectangular portion and said cut-away portion thereof being disposed within a side surface of said rectangular portion and which is connected to said opening, a beam portion being formed by said cut-away portion;

said holding member includes a plate having an arcuate portion having the same shape as that of said supporting member and a tail portion the width of which is gradually reduced;

said hookup terminals include five copper foils having a rectangular configuration and disposed upon said tail portion of said holding plate;

said lead wires include gold wires which are ohmically connected to said electrodes and said hookup terminals and are fixed to said beam portion of said supporting member at the intermediate portion thereof, and lead wires which are electrically connected to said hookup terminals and to a measurement circuit and which are covered by means fixed to said holding plate at the end portion of said tail portion thereof;

said diaphragm is coated with light shield means upon the entire exposed surface thereof; and

said exposed portions of said gold and lead wires are covered with an insulating material of a silicon rubber for providing electrical insulation therefor.

18. A pressure transducer as set forth in claim 13, wherein:

said supporting member is a plate having a countersunk recess provided within a portion thereof which corresponds to said strain sensitive region of said diaphragm and which has the same configuration and area as that of said strain sensitive region;

said leading part of said supporting member includes an opening provided within a portion of said supporting part which corresponds to said electrodes of said diaphragm and a cut-away portion provided within one end face of said supporting member, said lead wires thereby being connected to said electrodes within said opening of said leading part and being led out therefrom through said cut-away portion thereof;

a holding member is secured to said supporting member for reinforcing said supporting member and for mounting hookup terminals thereon so as to fix said lead wires thereon; and

said hookup terminals are mounted upon said holding member for connecting said lead wires connected to said electrodes to processing circuitry whereby said electrical signals are conducted externally from said transducer.

19. A pressure transducer according to claim 18, wherein:

said semiconductor diaphragm has an arcuate portion and a rectangular portion and is composed of an N type silicon single crystal of which the crystallographic plane is the (110) plane;

said strain sensitive region has a circular configuration and is formed so as to have a smaller thickness than said fixing region, by an etching method;

said strain sensitive elements are formed of a P type silicon layer by a mask diffusion method, said central stain sensitive elements including two elements disposed along the [110] crystallographic direction and said outer strain sensitive elements include two elements disposed along the [111] and [111] directions respectively;

said lead portions include P type silicon layers having an area which is substantially greater than that of said strain sensitive elements and which include rectangular and polygonal connecting parts having a substantially large width, four of said rectangular portions being separately defined while two other portions are connected so as to form a U-shaped integrally formed portion, all of said portions being collectively and integrally formed with said connecting parts upon said diaphragm;

said diaphragm is covered with an oxide film;

said electrodes include four rectangular and one U-shaped portions formed of aluminum films deposited by means of an evaporation method provided upon said four rectangular and one U-shaped portion collectively disposed upon said diaphragm;

said supporting member is a plate of crysatllized glass having the same shape as that of said diaphragm and including said countersunk recess having a circular configuration similar to that of said strain sensitive region of said diaphragm and disposed within said arcuate portion of said diaphragm, said opening of said leading part being disposed at a position corresponding to said electrodes of said diaphragm disposed upon said rectangular portion and said cut-away portion thereof being disposed within a side surface of said retangular portion and which is connected to said opening, a beam portion being formed by said cut-away portion;

said holding member includes a plate having a arcuate portion having the same shape as that of said supporting member and a tail portion the width of which is gradually reduced;

said hookup terminals include five copper foils having a rectangular configuration and disposed upon said tail portion of said holding plate;

said lead wires include gold wires which are ohmically connected to said electrodes and said hookup terminals and are fixed to said beam portion of said supporting member at the intermediate portion thereof, and lead wires which are electrically connected to said hookup terminals and to a measurement circuit and which are covered by means fixed to said holding plate at the end portion of said tail portion thereof; and

an insulating material, of a silicon rubber for providing electrical insulation, which covers the exposed portions of said gold and lead wires.

20. A pressure transducer as set forth in claim 1, wherein:

said diaphragm is a thin plate which includes said strain sensitive region which is adapted to be elastically strained as a result of said external pressure being applied thereto and which converts said elastic strain thus produced into an electrical signal, and said fixing or attaching region surrounds said strain sensitive region, said thin plate being fabricated of a semiconductor signal crystal material of a predetermined conductivity type and said strain sensitive region of the diaphragm being circular in form and the thickness thereof being thinner than that of said fixing region of said diaphragm, a layer integrally formed upon one surface of said strain sensitive and fixing regions and having electrical insulating characteristics different from said semiconductor single crystal material of said diaphragm in that said layer is of a type having the same conductivity as that of said semiconductor single crystal material of said diaphragm and a resistivity of no more than one thousandth of the resistivity of said semiconductor single crystal material of said diaphragm, and further being of such a predetermined pattern which includes said semiconductor strain sensitive elements so as to convert a strain produced therewithin into an electrical signal according to a piezoresistive effect when an external pressure is exerted upon said strain sensitive region, at least one pair of said strain sensitive elements being disposed within a central portion of said strain sensitive region and of which the longitudinal directions are disposed relative to said crystallographic directions so as to present the maximum sensitivity therefor while at least one other pair of said strain sensitive elements, disposed in a circumferential portion of said strain sensitive region and of which the longitudinal directions also disposed relative to said crystallographic directions so as to present maximum sensitivity, are also disposed symmetrically with respect to the center line of said strain sensitive region which is parallel with said longitudinal directions of said central elements, and lead portions having a small resistance, one end of which is respectively connected to one of said strain sensitive elements and the other end thereof is extended into said fixing region to said supporting member and which include electrodes which are positioned close to one another;

said supporting member being attached to said fixing region in such a manner that said strain sensitive region may be subjected to a pressure to be measured and being made of a material having substantially the same coefficient of thermal expansion as that of the material of said diaphragm, and which has a contersunk recess of a configuration and area which corresponds to those of said strain sensitive region of said diaphragm, a flat supporting part in contact with said fixing region of said diaphragm, and a leading part provided at the end portion of said supporting member which includes an opening provided within a portion thereof which corresponds to the portion of said electrodes disposed upon said lead portions of said diaphragm and through which said lead wires may be conducted outwardly of said transducer; and

said lead wires for conducting outwardly said electrical signals being respectively connected at one end thereof to said electrodes of said lead portions on said diaphragm and disposed within said opening of said leading part of said supporting member and at the other end thereof to a signal processing circuit positioned externally of said transducer through hookup terminals positioned upon a holding member for reinforcing said supporting member.