Beam type transducers employing accurate, integral force limiting
First Claim
1. In a beam type transducer of the type employing a deflectable beam having positioned on a surface thereof, at least one force responsive element, in combination therewith means for transmitting a force to said beam employing means for accurately stopping said beam for all forces in excess of a predetermined force, comprising:
- a. a silicon member having a central shallow depression on a surface thereof, said depression being of a predetermined depth selected according to said predetermined force,b. a glass cover member having a central aperture of a given dimension coupled to said silicon member to cover said depression,c. a rod having one end coupled to said silicon member within said depression and extending through said central aperture in said glass with said other end coupled to said beam for deflecting the same upon application of a force to said silcon member, such that all forces in excess of said predetermined force cause said silicon member to impinge upon said glass and thus stopping said silicon member and said rod coupled thereto according to the depth of said depression.
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Accused Products
Abstract
A beam transducer of the type activated by a push rod secured to a thin silicon diaphragm including a shallow deflection area determining depression. The rod is secured to the silicon within the depression and is surrounded by a plate of glass having a central rod accommodating aperture and secured to the silicon to generally cover the depression with the rod extending through the aperture in the glass. One end of the rod is coupled to a diffused beam for application of force thereto. Large forces as applied to the diaphragm and hence, the rod and the beam are limited when the silicon is caused to contact the glass plate and is stopped by the plate and according to the depth of the depression.
24 Citations
18 Claims
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1. In a beam type transducer of the type employing a deflectable beam having positioned on a surface thereof, at least one force responsive element, in combination therewith means for transmitting a force to said beam employing means for accurately stopping said beam for all forces in excess of a predetermined force, comprising:
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a. a silicon member having a central shallow depression on a surface thereof, said depression being of a predetermined depth selected according to said predetermined force, b. a glass cover member having a central aperture of a given dimension coupled to said silicon member to cover said depression, c. a rod having one end coupled to said silicon member within said depression and extending through said central aperture in said glass with said other end coupled to said beam for deflecting the same upon application of a force to said silcon member, such that all forces in excess of said predetermined force cause said silicon member to impinge upon said glass and thus stopping said silicon member and said rod coupled thereto according to the depth of said depression. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. Apparatus for activating a beam type transducer of the type comprising a relatively thin, clamped beam having located on a surface thereof, a force responsive element, said beam having an area for application of a force thereto to cause a proportional variation in a characteristic of said element, comprising:
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a. a semiconductor member having a shallow depression on a first surface thereof, said depression having a depth determined by the magnitude of a given force to be applied to said beam, b. a rod coupled to said member and positioned within said depression and extending from said semiconductor member in a direction relatively perpendicular to said first surface, c. a glass sheet having an aperture, said glass sheet coupled to said semiconductor member at said first surface with said rod extending therethrough and serving as a barrier to prevent said semiconductor member from deflecting beyond said glass position of said glass for forces applied to said semiconductor having a component to cause said rod to move relatively parallel to its axis, and d. means coupling the other end of said rod to said area of said beam. - View Dependent Claims (9)
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10. In combination:
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a. a cylindrical housing having a central hollow, being symmetrical about a longitudinal axis, b. a cantilever beam havng a first end affixed to a portion of said housing and a second deflectable end positioned relatively transverse to said axis, c. a force transmitting member coupled to said deflectable end of said beam, d. a rod having a first end coupled to said force transmitting member for activating the same in response to an applied force and positioned relatively parallel to said axis, e. a glass plate having a central rod accommodating aperture and secured to said housing at a first end with said rod postioned through said aperture, f. a silicon member bonded to said glass plate and having a shallow depression larger than said aperture in said glass and of a depth selected according to a predetermined force to be applied to said rod, said other end of said rod coupled to said silicon member within said depression, whereby a force applied to said member is transmitted to said rod and hence, to said beam, with said depression capable of coacting with said glass plate to limit said deflection due to said force according to the depth of said depression. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification