×

Transport system for semiconductor wafer multiprocessing station system

  • US 3,976,330 A
  • Filed: 10/01/1975
  • Issued: 08/24/1976
  • Est. Priority Date: 10/01/1975
  • Status: Expired due to Term
First Claim
Patent Images

1. A minimum volume enclosed semiconductor self-centering fluidic dual lane unidirectional transport system comprising the following interacting elements,a means for supplying a vectorized fluid cushion onto a transport surface and associated with,a means for circulating and filtering said fluid used as a transport means and coupled with,a means for adding make up fluid to the system in order to maintain a relatively constant volume pressure of fluid in said system and,having an interacting means for providing vacuum ports at specific system locations whereby vacuum eminating therefrom aids in the control of transport of work pieces for directing, and routing work pieces with,a means for cross over bidirectional intersections connected to,a means for entering and exiting work pieces to and from said system and associated with,a means for a storage hold up buffer connected to said system, anda means for work piece directional turn around with,a means for connecting said system with a multiplicity of processing units, anda means for providing the system with connected modular sections coupled with,a means for automatically controlling the transport of work pieces to and from processing unit stations and exit and inlet said work pieces to and from said system, anda means for fail safe interconnection of fluid and vacuum supply to said system connected to,a holding buffer and by pass directional turn around means juxtapostional to the entrance of each processing unit connected to said system.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×