Transport system for semiconductor wafer multiprocessing station system

• US 3,976,330 A
• Filed: 10/01/1975
• Issued: 08/24/1976
• Est. Priority Date: 10/01/1975
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Raacke, Karl Heinz, Bertelsen, Bruce Irving, Sirgo, Valdeko Harry, Townsend, Clarence Jay, Babinski, John Paul
• Primary Examiner(s): Blunk, Evon C.
• Assistant Examiner(s): Nase, Jeffrey V.
• Application Number:
  US05/618,654
• Time in Patent Office: 328 Days
• Field of Search: 302/2 R, 302/29, 302/31, 214/1 BE, 29/569 R, 29/563
• US Class Current: 406/84
• CPC Class Codes: B65G 51/03 over a flat surface or in troughs
• CPC Class Codes: H01L 21/67784 using air tracks

Abstract

The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect treated wafers in segregated lots. The enclosed system is at a positive pressure to avoid ambient contamination. The enclosed track system further embodies a device for the combined computerized control of individual wafer routing in the system, humidity, temperature, and particulate content of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further the transport system embodies among other features a device for bidirectional travel with cross over intersections, directional control means, buffer sections and a fluid vector from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a device for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form.

Claims

1. A minimum volume enclosed semiconductor self-centering fluidic dual lane unidirectional transport system comprising the following interacting elements,

a means for supplying a vectorized fluid cushion onto a transport surface and associated with,

a means for circulating and filtering said fluid used as a transport means and coupled with,

a means for adding make up fluid to the system in order to maintain a relatively constant volume pressure of fluid in said system and,

having an interacting means for providing vacuum ports at specific system locations whereby vacuum eminating therefrom aids in the control of transport of work pieces for directing, and routing work pieces with,

a means for cross over bidirectional intersections connected to,

a means for entering and exiting work pieces to and from said system and associated with,

a means for a storage hold up buffer connected to said system, and

a means for work piece directional turn around with,

a means for connecting said system with a multiplicity of processing units, and

a means for providing the system with connected modular sections coupled with,

a means for automatically controlling the transport of work pieces to and from processing unit stations and exit and inlet said work pieces to and from said system, and

a means for fail safe interconnection of fluid and vacuum supply to said system connected to,

a holding buffer and by pass directional turn around means juxtapostional to the entrance of each processing unit connected to said system.

2. A system in accordance with claim 1 wherein the fluid is air.

3. A system in accordance with claim 2 wherein said air is class 100 or less.

4. A system in accordance with claim 1 wherein said cross over bidirectional intersections is provided with vacuum ports for holding and centering the work piece in the course of travel in the system.

5. A system in accordance with claim 1 wherein said automatic control means is computer operated.

6. A system in accordance with claim 5 wherein said computer is semiautomatically or manually operated.

7. A system in accordance with claim 1 wherein the fluid is an inert gas.

8. A system in accordance with claim 1 wherein said congrol means provides for programmed random paths to and from process units.

9. A system in accordance with claim 1 wherein said control means provides preprogrammed by passing of specified process units by specifically identified work pieces.

10. A system in accordance with claim 1 wherein said vacuum supply ports are maintained in constant negative pressure mode.

11. A system in accordance with claim 1 wherein fluidic environmental conditions such as light wave length, temperature, particle content electrical charges are maintained in a desired condition.

12. A system in accordance with claim 1 wherein fluidic environmental atmosphere is at a pressure above ambient pressure.

13. A wafer transport system comprising,

a plurality of dual lane fluid cushion track segments,

an intersection control member connected to said segments at one end thereof, said member including vacuum ports and fluid pressure ports,

a wafer entrance and exit member connected to one of said plurality of segments at the other end thereof,

means for connecting a plurality of tools to said segments at the other ends thereof,

enclosure means for confining said track segments and said intersection control member within a given volume,

means for supplying filtered fluid into said enclosure means selectively through said pressure ports and through said track segments, said fluid being supplied at a pressure sufficiently high to produce within said enclosure means a pressure substantially higher than that of the ambient pressure,

means coupled to said vacuum ports for selectively producing a vacuum at said intersection control member, and

means for providing a fail-safe coupling between said fluid supply means and said vacuum producing means.