Fixed and variable threshold N-channel MNOSFET integration technique

• US 3,978,577 A
• Filed: 06/30/1975
• Issued: 09/07/1976
• Est. Priority Date: 06/30/1975
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Bhattacharyya, Arup, Kroll, Charles Thomas, Silverman, Ronald, Joshi, Madhukar Laxman
• Primary Examiner(s): Tupman, W.
• Application Number:
  US05/591,595
• Time in Patent Office: 435 Days
• Field of Search: 29/571, 29/578, 357/41, 357/23
• US Class Current: 438/275
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 27/088 the components being field-effect transistors with insulated gate
• CPC Class Codes: H01L 29/513 the variation being perpendicular to the channel plane
• CPC Class Codes: H01L 29/518 the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
• CPC Class Codes: H01L 29/792 with charge trapping gate insulator, e.g. MNOS-memory transistors
• CPC Class Codes: H10B 43/30 characterised by the memory core region
• CPC Class Codes: Y10S 148/043 Dual dielectric
• CPC Class Codes: Y10S 148/048 Energy beam assisted EPI growth
• CPC Class Codes: Y10S 148/141 Self-alignment coat gate

Abstract

Fully integrated non-volatile and fixed threshold field effect devices are fabricated in N-channel technology on a single semiconductor substrate. MOSFET devices of the metal-nitride-oxide-semiconductor (MNOS) devices are used both as fixed threshold support devices and as variable threshold non-volatile memory array devices. Extremely stable and reproducible device characteristics result from the use of low charge containing dielectrics which allow optimum variable threshold stability and allow the use of operating potentials compatable with conventional fixed threshold FET devices. Low temperature processing following deposition of variable threshold gate dielectric enables all enhancement mode operation. A field oxide structure including a thin silicon dioxide layer, an aluminum oxide layer and a nitride layer provides parasitic threshold voltages in excess of 60 volts and prevents sub-threshold leakage.

Claims

1. The method of making fixed and variable threshold field effect transistors comprising the steps of:

providing a plurality of paired source and drain regions and at least one isolation region of n-type semiconductor material in a semiconductor material of p-type conductivity,

providing a field dielectric structure over said source, drain and isolation regions comprising successive layers of silicon dioxide, aluminum oxide and silicon dioxide;

selectively removing said field dielectric structure from the channel regions of a plurality of source and drain regions associated with fixed threshold transistors;

growing a layer of silicon dioxide having a thickness of about 450 to 525 angstrom units in said channel regions of said fixed threshold transistors;

selectively removing said field dielectric from the channel regions of a plurality of sorce and drain regions associated with variable threshold transistors;

growing a layer of silicon dioxide having a thickness of about 31-34 angstrom units in said channel regions of said variable threshold transistors;

depositing a layer of silicon nitride over said field dielectric structure and said silicon dioxide layers in said channel regions;

depositing a layer of silicon dioxide over said silicon nitride layer; and

depositing conductive metallurgy to interconnect said fixed and variable threshold transistors.

2. The method of claim 1 wherein said silicon dioxide layer deposited over said silicon nitride layer is removed prior to depositing said conductive metallurgy.

3. The method of claim 1 wherein the processing temperatures following the growth of said silicon dioxide layer having a thickness of 450 to 525 angstrom units are maintained at less than 900°

C to prevent excessive charge accumulation.

4. The method of claim 1 wherein the thicknesses of said successive layers comprising said field dielectric are about 25-40 angstrom units of thermally grown silicon dioxide, about 100 to 200 angstrom units of aluminum oxide and about 7000 to 8000 angstrom units of silicon dioxide.