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Striped dichroic filter with butted stripes and dual lift-off method for making the same

  • US 3,981,568 A
  • Filed: 07/01/1974
  • Issued: 09/21/1976
  • Est. Priority Date: 11/13/1972
  • Status: Expired due to Term
First Claim
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1. A method for forming supplementary pattern in a spatial relationship of first and second coatings on a substrate having a surface comprising, forming a first layer having a pattern of a first plurality of spaced parallel stripes of a first material on said surface of said substrate which is complementary to that required for the first coating, applying a first coating to the surface and overlying the pattern on the first material, forming a first layer of a second material on said first coating, removing the first layer of first material by etching so that there remains on the surface the first coating with an overcoat of the second material, forming a second layer having a pattern of second plurality of spaced parallel stripes of the first material complementary to that required for the second coating, said pattern of the second layer of the first material serving as a bias mask and being biased so that there will be an overlap of the first and second coatings, applying the second coating, applying a second layer of the second material on the second coating, removing the second layer of the first material by etching and removing all of the layers of the second material by etching so that there remains the first and second coatings in patterns in which the edges of the first and second pluralities of stripes of the patterns abut each other with no overlap.

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