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Flow control apparatus and air filters

  • US 3,986,850 A
  • Filed: 12/05/1974
  • Issued: 10/19/1976
  • Est. Priority Date: 12/05/1974
  • Status: Expired due to Term
First Claim
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1. A clean room having provision for supplying a substantially uniformly distributed flow of filtered air therethrough and comprisingan enclosure including a top wall, a bottom wall, and bounding side walls,a filter bank disposed within said enclosure and positioned parallel to and spaced from one of said top and side walls to define an upstream side facing said one wall and a downstream side facing the opposite direction, said filter bank having an area substantially coextensive with the area of said one wall and comprising a supporting latticework defining a plurality of rectangular open areas, a plurality of high efficiency air filters positioned on said latticework with one of said filters covering each of said open areas, and independently operable valve means coextensively extending across the downstream side of each of said air filters for selectively and accurately regulating the volume of air flowing therethrough, each of said valve means comprisinga. a first substantially flat plate having myriad relatively small, regularly spaced apertures extending therethough, and with said apertures being positioned to overlie substantially the entire area of said plate, said first plate having a rectangular outline closely conforming to the rectangular outline of the associated open area in said latticework,b. a second substantially flat plate of a size and outline substantially corresponding to that of said first plate and having myriad apertures extending therethrough, said apertures in said second plate being of a size and spacing corresponding to the sized and spacing of the apertures in said first plate,c. means for mounting said first and second plates in an overlying, face to face relationship,d. means accessible from said downstream side of said filter bank for selectively translating one of said plates laterally with respect to the other plate such that the apertures in said plates may be selectively brought into alignment to effect opening of the valve means and brought out of alignment to effect closing of the valve means, ande. a film of highly viscous, non-evaporating fluid interposed between the full area of the opposing faces of said plates and serving to prevent the flow of air laterally therebetween, and flower means for introducing air under pressure to the upstream side of each of said air fliters such that the air flows through said filters and valve means and into the clean room.

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