Deep diode solid state inductor coil
First Claim
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1. A solid state inductor coil comprisinga body of semiconductor material having apredetermined first type conductivity, a predetermined level of resistivity, and a preferred crystallographic structure;
- two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation which is one selected from the group consisting of (111), (110) and (100);
a vertical axis which is substantially aligned parallel with a first preferred crystal axis of the material of the body;
an array of regions of second and opposite type conductivity disposed in the body;
each region of second type conductivity extending between, and terminating in, the two opposed major surfaces, and having two opposed end surfaces, each end surface being coextensive with a respective one of the major surfaces, and a longitudinal axis aligned substantially parallel with the vertical axis of the body;
the material of each second region consisting of recrystallized semiconductor material of the body formed in situ by the migration of a melt of metal-rich semiconductor material of the body through the entire body from one opposed major surface to the other by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the vertical axis of the body and having a predetermined level of concentration of the metal of the melt distributed substantially uniformly throughout the entire region, the level of concentration of the metal being determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration, the metal comprising at least one dopant impurity material for imparting the type conductivity and a predetermined level of resistivity to the recrystallized material of the region;
each second region being a path for conducting electrical currents between the opposed major surfaces of the body;
a P-N junction formed by the contiguous surfaces of the material of each region and the abutting material of the body, a portion of the junction being exposed at the opposed major surfaces, andmeans for electrically connecting the array of regions into a series electrical circuit arrangement to function as an inductor coil.
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Abstract
An array of columnar structures are provided in a body of semiconductor material. The material of each columnar structure is recrystallized material of the body having solid solubility of a dopant metal therein. Means are provided for connecting the columnar structures into a series electrical arrangement with each other to form a solid state inductor for integral circuits.
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Citations
28 Claims
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1. A solid state inductor coil comprising
a body of semiconductor material having a predetermined first type conductivity, a predetermined level of resistivity, and a preferred crystallographic structure; -
two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation which is one selected from the group consisting of (111), (110) and (100); a vertical axis which is substantially aligned parallel with a first preferred crystal axis of the material of the body; an array of regions of second and opposite type conductivity disposed in the body; each region of second type conductivity extending between, and terminating in, the two opposed major surfaces, and having two opposed end surfaces, each end surface being coextensive with a respective one of the major surfaces, and a longitudinal axis aligned substantially parallel with the vertical axis of the body; the material of each second region consisting of recrystallized semiconductor material of the body formed in situ by the migration of a melt of metal-rich semiconductor material of the body through the entire body from one opposed major surface to the other by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the vertical axis of the body and having a predetermined level of concentration of the metal of the melt distributed substantially uniformly throughout the entire region, the level of concentration of the metal being determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration, the metal comprising at least one dopant impurity material for imparting the type conductivity and a predetermined level of resistivity to the recrystallized material of the region; each second region being a path for conducting electrical currents between the opposed major surfaces of the body; a P-N junction formed by the contiguous surfaces of the material of each region and the abutting material of the body, a portion of the junction being exposed at the opposed major surfaces, and means for electrically connecting the array of regions into a series electrical circuit arrangement to function as an inductor coil. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification