Plasma spraying process for preparing polycrystalline solar cells

• US 4,003,770 A
• Filed: 03/24/1975
• Issued: 01/18/1977
• Est. Priority Date: 03/24/1975
• Status: Expired due to Term

• Current Assignee: Monsanto Research Corporation
• Original Assignee: Monsanto Research Corporation
• Inventors: Willson, Michael C., Janowiecki, Richard J., Harris, Douglas H.
• Primary Examiner(s): Rutledge, L. Dewayne
• Assistant Examiner(s): Saba, W. G.
• Application Number:
  US05/561,405
• Time in Patent Office: 666 Days
• Field of Search: 148/174, 148/175, 136/89, 357/30, 156/613, 156/614, 427/34, 427/113, 427/86, 29/572, 217/121 P
• US Class Current: 438/97
• CPC Class Codes: C23C 4/04 characterised by the coating material
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• CPC Class Codes: H01L 31/03682 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/068 the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
• CPC Class Codes: Y02E 10/546 Polycrystalline silicon PV cells
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y10S 148/049 Equivalence and options
• CPC Class Codes: Y10S 148/122 Polycrystalline

Abstract

Polycrystalline silicon films useful in preparing solar cells primarily for terrestrial application are prepared by a plasma spraying process. A doped silicon powder is injected into a high temperature ionized gas (plasma) to become molten and to be sprayed onto a low-cost substrate. Upon cooling, a dense polycrystalline silicon film is obtained. A p-n junction is formed on the sprayed film by spray deposition, diffusion or ion implantation. A sprayed junction is produced by plasma spraying a thin layer of silicon of opposite polarity or type over the initially deposited doped film. In forming a diffused junction, dopant is applied over the surface of the initial plasma-sprayed film usually from the vapor phase and heat is used to cause the dopant to diffuse into the film to form a shallow layer of opposite polarity to that in the original film. A junction is also formed by implanting dopant ions in the surface of the originally deposited film by the use of electrical fields. When used in conjunction with ohmic contacts and electrical conductors, the p-n junctions produced using plasma-sprayed polycrystalline silicon films are formed into solar cells which are useful for directly converting sunlight into electricity by means of the photovoltaic effect.

Claims

1. A process for preparing solar cells comprising the steps of:

a. generating a flowing plasma gas stream,

b. heating p- or n-doped silicon particles by injection into said plasma stream,

c. discharging said heated particles from said plasma stream onto a substrate providing a polycrystalline silicon film,

d. during steps (b) and (c) providing a suitable atmosphere surrounding said particles to inhibit oxidation,

e. preparing a p-n junction in said polycrystalline silicon film by diffusion or ion-implantation of a dopant of opposite polarity or type into said film or by forming a layer on said polycrystalline silicon film by plasma spraying doped silicon particles of opposite polarity or type, and

f. providing electrical conductors to control the flow of electricity produced by illuminating said p-n junction.

2. A process of claim 1 wherein said p-type dopant is boron and said n-type dopant is phosphorus.

3. A process of claim 1 wherein said p-n junctions are prepared in step (e) by ion implantation.

4. A process of claim 1 wherein said p-n junctions are prepared in step (e) by diffusion.

5. A process of claim 1 wherein said p-n junctions are prepared in step (e) by plasma spraying.

6. A process of claim 1 wherein said polycrystalline film is heat treated to improve grain size.