Fabrication of high aspect ratio masks

• US 4,018,938 A
• Filed: 06/30/1975
• Issued: 04/19/1977
• Est. Priority Date: 06/30/1975
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Spiller, Eberhard A., Feder, Ralph
• Primary Examiner(s): Newsome, John H.
• Application Number:
  US05/591,986
• Time in Patent Office: 659 Days
• Field of Search: 96/35.1, 96/36.2, 250/322, 250/323, 250/320, 250/492, 427/43, 427/36, 427/272, 427/273
• US Class Current: 430/296
• CPC Class Codes: G03F 1/22 Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
• CPC Class Codes: G03F 7/2039 X-ray radiation
• CPC Class Codes: H05K 3/0002 for manufacturing artworks for printed circuits
• CPC Class Codes: H05K 3/108 by semi-additive methods; masks therefor characterised by metallic etch mask H05K3/062; electroplating methods or apparatus H05K3/241
• CPC Class Codes: Y10S 430/167 X-ray
• CPC Class Codes: Y10S 430/168 X-ray exposure process

Abstract

A method of constructing masks characterized by a high aspect ratio. The method includes at least a single exposure of a mask by radiation which is transmitted by the substrate before impinging on the resist. In a specific embodiment the mask is partially completed and the already deposited mask modulates the radiation transmitted by the substrate before it exposes the resist.

Claims

1. A method of manufacturing a mask characterized by an aspect ratio ≦

1 comprising the steps of;

a. providing a mask of aspect ratio ≦

1 on a substrate transparent to radiation, said mask defined by selective areas absorbent of said radiation and,

b. coating said mask with material which becomes insoluble in a developer in response to said radiation,

c. exposing said mask and said material to said radiation with said substrate located between said mask and a source of said radiation,

d. developing said material, and

e. plating masking material absorbent to said radiation in areas in which said radiation responsive material was removed by said developing whereby the height of said radiation absorbent masking material is increased to thereby increase the aspect ratio of said mask.

2. The method of claim 1 in which said radiation comprises x-rays.

3. The method of claim 1 in which said substrate is selected from the group of mylar, Be, Si₃ N₄, SiO₂, Si, Al₂ O₃, B₄ C, BN, C, and B₂ O₃.

4. The method of claim 1 in which the material employed in said coating step is a negative resist.

5. The method of claim 1 wherein said plating step is carried out to provide a mask height of at least one micron.

6. The method of claim 1 wherein said steps of coating, exposing, developing and plating are carried out a plurality of times.

7. The method of claim 1 wherein said steps of coating, exposing, developing and plating are carried out until the aspect ratio of said masking material is at least equal to 2.

8. The method of claim 1 wherein said providing step includes,

coating said substrate with a positive resist material, exposing said coated substrate to radiation modulated by a master mask, developing said resist, and plating radiation absorbent metal into the areas from which resist was removed during said developing step.

9. The method of claim 8 in which metal plating step is followed by a step of removing resist remaining on said substrate.

10. The method of claim 8 in which step of exposing said coated substrate employs an electron beam.

11. The method of claim 8 in which said step of coating said coated substrate is preceded by a step of depositing a plating layer.

12. The method of claim 9 in which said plating layer is in the range of 200°

A.

13. The method of claim 12 in which said plating layer is Cu.

14. A method of increasing the aspect ratio of a mask, having an aspect ratio less than 1, to an aspect ratio greater than 1, in which the mask, whose aspect ratio is to be increased is formed of a material absorptive of X-radiation on a substrate transmissive of X-radiation, said method comprising the steps of:

a. coating said mask with a material which becomes insoluble in a developer in response to said X-radiation;

b. exposing said mask and said material to X-radiation with said substrate located between said mask and a source of X-radiation;

c. developing said material; and

,

d. plating additional masking material, absorbent to X-radiation, in areas in which said radiation responsive material was removed by said developing whereby the height of said radiation absorbent masking material is increased to thereby increase the aspect ratio of said mask.

15. The method of claim 14 in which each of said steps a-d is carried out at least twice.

16. The method of claim 14 in which said step (a) is carried out with a negative resist material.

17. The method of claim 14 wherein said substrate is selected from the group of mylar Be, Si₃ N₄, SiO₂, Si, Al₂ O₃, B₄ C, BN, C and B₂ O₃.

18. The method of claim 14 in which said masking material is selected from the group consisting of gold, copper and platinum.