Thin film circuit

• US 4,020,222 A
• Filed: 06/18/1975
• Issued: 04/26/1977
• Est. Priority Date: 06/19/1974
• Status: Expired due to Term

• Current Assignee: Siemens AG
• Original Assignee: Siemens AG
• Inventors: Schauer, Alois, Kausche, Helmold
• Primary Examiner(s): Kendall, Ralph S.
• Application Number:
  US05/587,965
• Time in Patent Office: 678 Days
• Field of Search: 427/126, 427/99, 204/192, 428/195, 428/209, 428/457, 428/433, 428/210
• US Class Current: 428/209
• CPC Class Codes: H01L 27/016 Thin-film circuits
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
• CPC Class Codes: Y10T 428/24917 including metal layer
• CPC Class Codes: Y10T 428/24926 including ceramic, glass, porcelain or quartz layer
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

A thin film circuit consisting of a planar substrate of insulating material and a thin metal film formed from an alloy of aluminum with between 2 to 20 atom percent tantalum from which resistors and capacitors are developed. The metal film has an equivalent composition to a film which is formed by means of reactive cathode sputtering. In particular, the film is equivalent to a film formed using a cathode of aluminum and tantalum which is reactively sputtered in a sputtering atmosphere containing oxygten with a low partial pressure.In such an arrangement, the temperature coefficient of resistance and the capacity temperature coefficient compensate one another. The alloy films have a high oxidation stability and the resistors and capacitors therefrom have a high resistance to aging.

Claims

1. A thin film circuit comprising a planar substrate of insulating material, supported by said substrate at least one metal film, from which are made by photolithographic techniques the capacitors as well as the resistors, said metal film consisting of an alloy of aluminum with between 2 and 20 atom per cent tantalum and containing oxygen in an amount sufficient so that the temperature coefficient of the resistors is between -300 and -500 ppm/K in order to compensate the positive TCC of the capacitors with the negative TCR of the resistors in RC-networks.

2. A thin film circuit in accordance with claim 1 wherein the metal film has an amorphous structure.

3. A thin film circuit in accordance with claim 1 wherein the metal film consists of an alloy of aluminum with 6 to 12 atom percent tantalum.

4. A thin film circuit in accordance with claim 1 wherein the specific resistance of the metal film is in the range between 2500 and 3700 /μ

Ω

cm.

5. A thin film circuit in accordance with claim 1 wherein the specific resistance of the metal film is approximately 2800 μ

Ω

cm.

6. A thin film circuit in accordance with claim 1 wherein the specific resistance of the metal film is approximately 3700 μ

Ω

cm.

7. A thin film circuit in accordance with claim 1 wherein the substrate is a glass substrate and has a coating of Ta₂ O₅ .

8. A thin film circuit in accordance with claim 1 wherein the metal film has a thickness of 350 - 400 nm and a resistance of between 70 and 100Ω

per square.