Field effect transistor monitors

• US 4,024,561 A
• Filed: 04/01/1976
• Issued: 05/17/1977
• Est. Priority Date: 04/01/1976
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Ghatalia, Ashwin Kantilal
• Primary Examiner(s): Wojciechowicz, Edward J.
• Application Number:
  US05/672,687
• Time in Patent Office: 411 Days
• Field of Search: 357/23, 357/41, 327/62, 327/64
• US Class Current: 257/365
• CPC Class Codes: G01R 31/2621 for testing field effect transistors, i.e. FET's
• CPC Class Codes: G01R 31/2644 Adaptations of individual semiconductor devices to facilitate the testing thereof
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633
• CPC Class Codes: H01L 29/78 with field effect produced by an insulated gate H01L29/7725, H01L29/775, H01L29/778 take precedence

Abstract

Method and apparatus for measuring or determining characteristics, such as the actual effective width of a first conductive medium of a given design width produced by an integrated circuit process. The first conductive medium is formed apart from and parallel to a second and similar conductive medium of a given design width on an insulating medium which is disposed on a semiconductor substrate. The substrate has a first conductivity region and first and second parallel strips of a second and opposite conductivity disposed at one surface thereof within the first conductivity region for forming a channel of a given length. The first and second conductive media are arranged orthogonal to the first and second strips. A first voltage is applied between the first conductive medium and the first parallel strip and a second voltage is applied between the second conductive medium and the first parallel strip. Current is measured in the second parallel strip upon application of the first voltage and upon application of the second voltage. The actual or effective widths of the first and second conductive media are then determined by utilizing relationships between the measured currents and known constants, such as the design widths of the conductive media. In one embodiment, the etch bias of the conductive media may be obtained by forming the first and second media with different design widths. In another embodiment, the precision of alignment of an element at one level with an element at another level may be obtained by providing first and second parallel edges of a channel at one level and disposing at another level an edge of each of the first and second conductive media over the channel and parallel to the edges of the channel.

Claims

1. A monitoring system for determining channel widths comprising,

a semiconductor substrate having a first conductivity region and first and second parallel strips of a second conductivity disposed at one surface thereof within said first conductivity region,

a first conductive strip having a nominal width and a second conductive strip having a nominal width arranged parallel to each other and extending between said first and second parallel strips for forming first and second conductive channels, respectively, in said first conductivity region,

a thin dielectric medium interposed between said conductive strips and said substrate,

means for selectively applying a first voltage between said first conductive strip and said first parallel strip and for selectively applying a second voltage between said second conductive strip and said first parallel strip, and

means for measuring current flow in said second parallel strip upon application of said first voltage and upon application of said second voltage to determine in relationship with the nominal width of at least one of said conductive strips the widths of said first and second channels.

2. A monitoring system as set forth in claim 1 wherein said current flow measuring means includes a source of voltage applied to said second parallel strip.

3. A monitoring system as set forth in claim 2 wherein said current flow measuring means and said voltage applying means provide voltage and current values used in a relationship for providing a ratio between the widths of said first and second channels which is a constant K.

4. A monitoring system as set forth in claim 3 wherein the width of one of said channels is determined by a relationship which is equal to 2 times the design width of one of the channels divided by the constant (K+1).

5. A monitoring system as set forth in claim 3 wherein the width of one of said channels is determined by a relationship which is equal to the design width of one of the channels minus the design width of the other of said channels divided by the constant (K-1).

6. A monitoring system as set forth in claim 3 wherein the constant K is derived in accordance with the relationship ##EQU4## where I1s is the current flow in the first parallel strip produced by said first voltage and I2s is the current flow in the first strip produced by said second voltage, V1gs and V2gs are said first and second voltages, respectively, and Vt1 and Vt2 are the threshold voltages at which current begins to pass through said first and second channels.

7. A monitoring system as set forth in claim 6 wherein said first and second channels have different design widths.

8. A monitoring system as set forth in claim 6 wherein said first and second channels have the same design width.

9. A monitoring system as set forth in claim 6 wherein an edge of each of said first and second parallel strips and an edge of each of said first and second conductive strips define said first and second conductive channels.

10. A monitoring system as set forth in claim 6 further including a conductive layer interposed between said thin dielectric medium and said first and second conductive strips, said conductive layer having first and second openings therein disposed between said first and second parallel strips, an edge of each of said openings and an edge of each of said first and second conductive strips define said first and second conductive channels.