Semiconductor slice prealignment system

• US 4,024,944 A
• Filed: 12/24/1975
• Issued: 05/24/1977
• Est. Priority Date: 12/24/1975
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Adams, Anthony Lionel, Head, Claude Dedmond III
• Primary Examiner(s): Love, John J.
• Assistant Examiner(s): Thomson, Richard K.
• Application Number:
  US05/644,225
• Time in Patent Office: 517 Days
• Field of Search: 198/237, 198/239, 198/241, 198/245, 198/257, 198/261, 198/262, 198/19, 198/379, 198/394, 198/395, 198/401, 198/414, 250/235, 250/578, 250/548, 302/2 R
• US Class Current: 198/394
• CPC Class Codes: B65G 2203/042 Sensors
• CPC Class Codes: B65G 47/24 orientating the articles
• CPC Class Codes: H01L 21/67796 with angular orientation of workpieces H01L21/67787 and H01L21/67793 take precedence
• CPC Class Codes: Y10S 414/136 including wafer orienting means

Abstract

A system for the alignment and orientation of disc-like objects having transport means to move the object gently onto a turntable and against an arcuate resilient stop to a centered position on the turntable; an array of non-contact sensors is advanced toward the rotational axis of the turntable until one of the sensors detects the edge of the object; the turntable is rotated until the sensors detect an indexing flat on the object; the sensor arrays advance and the turntable rotated until the sensors indicate the desired alignment and orientation of the object has been achieved. Logic circuitry controls the sensor and turntable positions automatically in response to signals received from the sensors.

Claims

1. A system for accurately aligning a generally circular wafer member having a flat region along a portion of its periphery comprising:

a. a turnable means mounted for rotation about a central axis perpendicular to its surface;

b. conveyer means to deliver said wafer member gently to a position at rest on said turntable;

c. a moveable stop member including an arcuate bumper member of resilient cushioning material, the arc of said bumper being of essentially the same radius as that of said wafer member and of a length greater than the arc of said wafer member subtended by said flat region of its periphery;

d. means to move said stop member to various positions between and including a first position wherein the bottom edge of said bumper is in contact with said turntable and the center of the arc of said bumper member lies on said central perpendicular axis of said turntable and a second position in which said bumper member is sufficiently spaced from a wafer member centered on the axis of said turntable that rotation of said wafer member is not impeded by said bumper;

e. means providing a fluid film to support said wafer member just above said turntable;

f. means urging said wafer member into contact with said bumper member in said first position thereby centering said wafer for rotation;

g. sensor means indicating when said wafer is centered about said perpendicular axis;

h. means clamping said wafer to said turntable in said centered position;

i. controllable means to rotate said turntable about said central axis;

j. a sensor array mounted adjacent said turntable and having at least three sensors positioned to produce sensing areas in the plane of said wafer and along an arc of a circle having a radius co-linear with but larger than the radius of said wafer member and within a spacing no greater than the length of the flat region of said wafer periphery, the middle one of said sensing areas being nearest said perpendicular axis of said turntable;

k. controllable means to produce relative movement between said sensing areas and a centered wafer member in a direction parallel to said co-linear radii; and

l. means responsive to all of said sensor means to control operations of said means to move said stop member, said means providing a fluid film, said means urging said wafer, said means clamping said wafer, said control means to rotate and said controllable means to produce relative movement.

2. The system as defined in claim 1 wherein said last mentioned means comprises logic circuitry.

3. The system defined in claim 1 wherein said last mentioned means comprises an appropriately programmed digital computer.

4. The system as defined in claim 1 wherein said means to move said stop member, said controllable means to rotate said turntable and said controllable means to produce relative movement are each reversible electric motors.

5. The system as defined in claim 1 wherein said means providing a fluid film comprises pressurized air streams impinging on the bottom surface of said wafer perpendicular thereto.

6. The system as defined in claim 1 wherein said means urging said wafer member comprises pressurized air streams impinging on the top surface of said wafer at an angle thereto in a direction toward said bumper member.

7. The system as defined in claim 1 wherein said means clamping said wafer comprises passages in said turntable between the surface thereof and a partial vacuum chamber.

8. A system for accurately aligning a generally circular wafer member having a flat region along a portion of its periphery comprising:

a. turntable means mounted for rotation about a central axis perpendicular to its surface;

b. fluid film conveyer means to deliver said wafer member to a position at rest on said turntable;

c. a moveable stop member including an arcuate bumper member of a resilient cushioning material, the arc of said bumper being essentially of the same radius as said wafer and of a length greater than the arc of said wafer member subtended by said flat portion of its periphery;

d. reversible electric motor means coupled to said stop member to move said stop member to various positions including a first position wherein the bottom edge of said bumper is in sufficiently close proximity to the surface of said turntable to block passage of said wafer member and the center of the arc of said bumper member lies on said central perpendicular axis of said turntable and a second position wherein said bumper member is located on the same radius of said turntable as in said first position but sufficiently removed from the center of said turntable that rotation of said turntable and wafer member are not impeded thereby;

e. means providing fluid film support of said wafer member just above said turntable comprising a plurality of pressurized air streams emanating from openings in the surface of said turntable in a direction perpendicular to said surface;

f. means urging said wafer member into contact with said bumper member in said first position thereby centering said wafer member for rotation with said turntable comprising a plurality of pressurized air streams impinging against the top surface of said wafer member at angles other than perpendicular to said surface and in directions toward said bumper member;

g. sensor means providing indication of a centered position of said wafer member;

h. means including openings in the surface of said turntable to apply a partial vacuum to the bottom surface of said wafer member thereby clamping said wafer member to said turntable;

i. reversible electric motor means coupled to rotate said turntable about said perpendicular axis;

j. a photosensor array mounted adjacent said turntable and having at least three sensors positioned to produce three equally spaced sensing areas in the plane of said wafer on an arc of a circle having a radius co-linear with an approximately twice the length of the radius of said wafer member, said sensing areas being within a spacing no greater than the length of said flat portion of the periphery of said wafer, the middle one of said sensing areas being nearest said perpendicular axis of said turntable;

k. reversible electric motor means coupled to produce relative movement between said sensing areas and said centered wafer member in a direction parallel to said co-linear radii; and

l. logic circuitry responsive to the condition of all of said sensor means to control the operation of said conveyer means, said means providing fluid film support, said means urging said wafer member, said means to apply partial vacuum, and all of said reversible electric motor means.

9. A system as defined in claim 8 wherein said bumper means comprises polytetrafluoroethelyne.

10. The system as defined in claim 8 wherein said reversible electric motor means coupled to produce relative movement produces movement of said sensor array.

11. A system as defined in claim 8 wherein said logic circuitry comprises an appropriately programmed digital computer.

12. A method for accurately aligning a generally circular wafer member having a flat indexing region along its periphery comprising:

a. delivering a wafer member onto the surface of the turntable;

b. positioning an arcuate stop member having a radius substantially the same as that of said wafer member such that the center of the arc of said stop member lies on the perpendicular axis of rotation of said turntable and the lower edge of said stop member is in sufficient proximity to the surface of said turntable to prevent passage of said wafer;

c. supporting said wafer just above said turntable by applying a plurality of pressurized air streams to the bottom surface of said wafer and normal thereto;

d. urging said wafer into contact with said stop member along its periphery by applying a plurality of pressurized air jets at an angle to the upper surface of said wafer;

e. thereafter applying a partial vacuum to the bottom surface of said wafer to clamp said wafer to said turntable;

f. establishing at least three sensing areas adjacent said wafer, said sensing areas being in the plane of said wafer and arranged along an arc of a circle having a radius co-linear with but larger than the radius of said clamped wafer, a middle one of said sensing areas being closest to said perpendicular axis of said turntable;

g. producing relative movement between said sensing areas and said clamped wafer toward each other along paths parallel to said co-linear radii until said middle one of said sensing areas moves onto said wafer;

h. rotating said turntable until said middle sensing area moves off said wafer at said flat periphery region thereof;

i. producing further relative movement between said sensing areas and said clamped wafer toward each other until said middle sensing area again moves onto said wafer;

j. rotating said clamped wafer in a direction dependent upon which others of said plurality of sensing areas is on said wafer until said middle sensing area again moves off said wafer; and

k. thereafter repeating steps i and j until relative positions of said sensing areas and said clamped wafer are such that said middle sensing area is not on said wafer and the others of said plurality of sensing areas are at least partially on said clamped wafer.

13. The method as defined in claim 12 further including the steps of

aa. detecting the relative center location of said wafer before performing the step e of Claim 12;

bb. allowing said wafer to come to rest on said turntable when said wafer is in an off center location;

cc. rotating said turntable through a partial revolution;

dd. thereafter repeating steps c-e of claim 12; and

ee. subsequent to step k of claim 12 producing relative movement between said sensing areas and said clamped wafer away from each other along said paths and determining if corresponding sensing areas on opposite sides of said middle sensing area move off of said wafer simultaneously.

14. The method of claim 12 further including the step of removing said stop member from the vicinity of said wafer subsequent to step f.

15. The method of claim 13 further including the step of removing said stop member from the vicinity of said wafer subsequent to step f.

16. The method of claim 12 wherein said sensing areas are established in equally spaced relationship and said relative movements are produced by moving said sensing areas.

17. The method of claim 13 wherein said sensing areas are established in equally spaced relationship and said relative movements are produced by moving said sensing areas.

18. The method defined in claim 16 wherein said sensing areas are established in an arc having a radius essentially twice that of said clamped wafer.

19. The method defined in claim 17 wherein said sensing areas are established in an arc having a radius essentially twice that of said clamped wafer.

20. A system for accurately orienting a generally circular wafer member having a flat region along at least a portion of its periphery comprising;

a. controllable means to rotate said wafer member about its perpendicular central axis;

b. a sensor array having a plurality of sensors so mounted as to produce at least three sensing areas in the plane of said wafer member and along an arc of a circle of a radius co-linear with but larger than the radius of said wafer member and within a spacing no greater than the length of said flat portion on the periphery of said wafer member, the middle one of said sensing areas being nearest said perpendicular axis;

c. controllable means to produce relative movement between said sensor areas and said wafer member in a direction parallel to said co-linear radii;

d. means responsive to the condition of said sensors of said array to control said controllable means to rotate and said controllable means to produce relative movement.

21. A system as defined in claim 20 wherein said sensing areas are equally spaced.

22. A system as defined in claim 21 wherein said middle sensing area lies on the line of said co-linear radii.

23. A system as defined in claim 22 wherein said controllable means comprise reversible electric motors and said means responsive to the condition of said sensors comprises logic circuitry controlling the application of power to said motors.

24. A system as defined in claim 20 wherein the radius of the arc of said circle is approximately twice that of said wafer member.

25. A system as defined in claim 21 wherein the radius of the arc of said circle is approximately twice that of said wafer member.

26. A system as defined in claim 23 wherein said logic circuitry comprises an appropriately programmed digital computer.

27. The method of rotationally orienting a generally circular wafer member having a flat region along its periphery comprising:

a. mounting said wafer member for rotation about its central axis normal to its surface;

b. establishing three sensing areas adjacent said wafer, said sensing areas being in the plane of said wafer and arranged along an arc of a circle having a radius co-linear with and larger than a radius of said wafer, the middle of said sensing areas being closest to said central axis;

c. producing relative movement between said sensing areas and said wafer to bring them closer together in paths parallel to said co-linear radii until said middle sensing area moves onto said wafer;

d. rotating said wafer until said middle sensing area moves off of said wafer at said flat peripheral region;

e. producing further relative movement between said sensing areas and said wafer toward each other along said paths until said middle sensing area again moves onto said wafer;

f. rotating said wafer in a direction dependent upon which other of said three sensing areas is on said wafer and until said middle sensing area again moves off of said wafer; and

g. thereafter repeating steps e and f until the relative position of said sensing areas and said wafer are such that said middle sensing area is not on said wafer and the other two of said sensing areas are on said wafer.

28. The method as defined in claim 27 further comprising the additional step of

h. producing relative movement between said sensing area and said wafer apart along said paths and determining if said other two sensing areas move off of said wafer simultaneously.

29. The method as defined in claim 27 wherein said relative movement is produced by moving said sensing areas.

30. The method as defined in claim 28 wherein said relative movement is produced by moving said sensing areas.

31. The method as defined in claim 27 wherein said sensing areas are established in equally spaced relationship.

32. The method as defined in claim 28 wherein said sensing areas are established in equally spaced relationship.

33. The method as defined in claim 27 wherein said sensing areas are established in an arc having a radius approximately twice that of said wafer.

34. The method as defined in claim 28 wherein said sensing areas are established on an arc having a radius approximately twice that of said wafer.

35. The method as defined in claim 31 wherein said sensing areas are established in an arc having a radius approximately twice that of said wafer.

36. The method as defined in claim 32 wherein said sensing areas are established in an arc having a radius approximately twice that of said wafer.

37. The method of centering a generally circular wafer member having a flat region along its periphery on a turntable comprising the steps of:

a. transporting said wafer member along a conveyor toward said turntable at a speed just sufficient to allow said wafer to come to rest on said turntable;

b. moving an arcuate cushioned bumper member into a position on said turntable at which said wafer will be centered for rotation when said wafer is in contact with the arc of said bumper along a portion of its periphery;

c. supporting said wafer in place just above the surface of said turntable by applying a plurality of pressurized air streams to the bottom surface of said wafer;

d. urging said wafer into contact with said bumper member along its periphery by applying a plurality of pressurized air streams at an angle to the upper surface of said wafer;

e. determining whether said wafer is in an off-center location by reason of said flat region being in contact with one end of said bumper or if said wafer is in a centered location;

f. applying a partial vacuum to the bottom surface of said wafer to clamp said wafer to said turntable in response to the detection of said wafer at a centered location;

g. allowing said wafer to come to rest on the surface of said turntable responsive to the detection of an off-center location;

h. rotating said turntable through a partial revolution; and

i. thereafter repeating steps c through g.

38. The method as defined in claim 37 further comprising the step of removing the bumper from the vicinity of said wafer after clamping said wafer to said turntable.

39. A system for accurately centering a circular wafer member having a flat region along a portion of its periphery comprising:

a. a turntable member having an axis of rotation perpendicular to its surface;

b. conveyer means to deliver said wafer to said turntable;

c. moveable stop member including an arcuate bumper member of resilient cushioning material, the arc of said bumper being essentially of the same radius as said wafer member and of a length greater than the arc of said wafer member subtended by said flat region;

d. means to position said stop member on said turntable such that the center of the arc of said bumper member lies on said axis of rotation;

e. means providing a fluid film to support said wafer member just above said turntable; and

f. means urging said wafer member into contact with said bumper member thereby centering said wafer for rotation.

40. A system for accurately centering a circular wafer member as defined in claim 39 further including means to detect off center location of said wafer when urged against said bumper and to incrementally rotate said wafer until said wafer is centered when urged against said bumper.

41. A system for accurately centering a circular wafer member as defined in claim 39 wherein said means urging said wafer member against said bumper member and said means providing a fluid film are pressurized air streams.

42. A system for accurately centering a circular wafer member as defined in claim 40 wherein said means urging said wafer member against said bumper member and said means providing a fluid film are pressurized air streams.

43. A system for accurately centering a circular wafer member as defined in claim 39 wherein said means providing fluid film comprises pressurized air streams impinging on the bottom surface of said wafer in a direction normal thereto.

44. A system for accurately centering a circular wafer member as defined in claim 39 wherein said means urging said wafer member against said bumper member comprises pressurized air streams impinging on the upper surface of said wafer member at an angle thereto and in the direction of said bumper member.

45. A system for accurately centering a circular wafer member as defined in claim 40 wherein said means providing a fluid film comprises pressurized air streams impinging on the bottom surface of said wafer in a direction normal thereto and said means urging said wafer member against said bumper member comprises pressurized air streams impinging on the upper surface of said wafer member at an angle thereto and in the direction of said member.

46. A system as defined in claim 39 further comprising means to clamp said wafer member to said turntable in contact with said bumper member.

47. A system as defined in claim 40 further comprising means to clamp said wafer member to said turntable in a centered position in contact with said bumper member.

48. A system as defined in claim 45 further comprising means to clamp said wafer member to said turntable in a centered position in contact with said bumper member.

49. A system as defined in claim 46 wherein said means to clamp comprises means for applying a partial vacuum to the bottom surface of said wafer member.

50. A system as defined in claim 47 wherein said means to clamp comprises means for applying a partial vacuum to the bottom surface of said wafer member.

51. A system as defined in claim 48 wherein said means to clamp comprises means for applying a partial vacuum to the bottom surface of said wafer member.