Acoustic microscope

• US 4,028,933 A
• Filed: 06/18/1975
• Issued: 06/14/1977
• Est. Priority Date: 02/15/1974
• Status: Expired due to Term

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Quate, Calvin F., Lemons, Ross A.
• Primary Examiner(s): Queisser, Richard C.
• Assistant Examiner(s): Beauchamp, John P.
• Application Number:
  US05/587,817
• Time in Patent Office: 727 Days
• Field of Search: 73/67.5 R, 73/67.5 H, 73/67.6, 73/67.7, 73/67.8 R, 73/67.8 S, 73/67.9, 73/71.5 US, 340/1 R, 340/5 MP, 340/5 H, 340/8 L
• US Class Current: 73/627
• CPC Class Codes: G01H 3/125 for representing acoustic field distribution using optical means G01H9/002; sonar systems for imaging G01S7/56, G01S15/89; acoustic holography G03H3/00
• CPC Class Codes: G01N 29/06 Visualisation of the interior, e.g. acoustic microscopy medical or veterinary diagnosis using sonic waves A61B8/00; representation of acoustic wave distribution G01H3/125, G01H9/002; short-range imaging systems using reflection of acoustic waves G01S15/8906
• CPC Class Codes: G01N 29/0609 Display arrangements, e.g. colour displays indicating or recording in connection with measuring in general G01D
• CPC Class Codes: G01S 15/8906 Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
• CPC Class Codes: G10K 11/30 using refraction, e.g. acoustic lenses

Abstract

A scanning acoustic microscope wherein a high frequency acoustic plane wave is focused by an acoustic lens to scan an object at the focal plane and is then recollimated by a second acoustic lens, detected with a piezoelectric detector, and the detected acoustic signal applied to an oscilloscope to provide a visual display.

Claims

1. An acoustic microscope for producing an image of an object of interest utilizing high frequency acoustic wave energy, comprising:

a. transducer means for generating acoustic energy at a frequency of at least 100MHz.

b. means forming a first solid acoustic energy propagating medium having a predetermined acoustic velocity C1 disposed adjacent said acoustic energy generating means, said transducer means and propagating medium forming a collimated beam of acoustic energy;

c. a first acoustic lens means disposed adjacent the other end of said acoustic energy propagating medium, said acoustic means forming a focal point outside of said acoustic energy propagating means, said lens having a predetermined f number;

d. a fluid acoustic energy propagating medium having a predetermined acoustic velocity C2, disposed adjacent said acoustic lens means and within which an object to be observed may be positioned, said fluid medium having an acoustic velocity to provide a wavelength of said acoustic energy of about 15 microns or less in said medium and substantially less than the acoustic velocity of said acoustic energy propagating medium, said velocity C1 and C2 being chosen such that their ratio produces an acoustical optical system having negligible spherical aberration;

e. means for moving, relatively, said object to be observed with respect to the beam such that the focal point of said acoustic lens occurs on the surface or within the object to be observed;

f. a second solid acoustic energy propagating medium in contact with the fluid medium and having a concavity therein forming a second acoustic lens whose focal point is coincident with said first acoustic lens; and

g. a piezoelectric transducer located on the end of said second acoustic propagating medium remote from said second acoustic lens for detecting the acoustic energy perturbed by said object so that an image of the object of interest is obtainable.

2. An acoustic microscope according to claim 1 wherein said first and second acoustic propagating media each has an acoustic velocity at least double that of said fluid medium.

3. An acoustic microscope according to claim 1 wherein said first and second acoustic propagating media each constitutes a solid having a spherical concavity at one end thereof to form said acoustic lens with a radius of curvature of substantially 400 microns.

4. An acoustic microscope as in claim 1 wherein said first and second acoustic lenses are aplanatic.

5. An acoustic microscope as in claim 1 wherein said second acoustic propagating medium, said second acoustic lens and the piezoelectric transducer are disposed to detect acoustic energy transmitted beyond the object.

6. An acoustic microscope as in claim 1 wherein said second acoustic propagating medium, said second acoustic lens and the piezoelectric transducer are disposed to detect acoustic energy reflected by the object.

7. An acoustic microscope according to claim 1 further including a radio frequency generator operating in the microwave frequency region of the electromagnetic spectrum and connected to the transducer means.

8. An acoustic microscope as in claim 1 further including a radio frequency generator that generates a chirp output that drives the transducer means.

9. An acoustic microscope as in claim 1 further including means for phase comparing the output of a radio frequency generator with the detected acoustic signal perturbed by the object.

10. The apparatus of claim 1 wherein said detector means including means for obtaining a visible image of the object.

11. An acoustic microscope according to claim 10 wherein said visual-image display means includes an oscilloscope.

12. An acoustic microscope according to claim 11 wherein

said oscilloscope is operative to provide several color displays, and which comprises

means for generating several acoustic beams at different frequencies,

means for detecting the different perturbed acoustic signals resultant from the several acoustic beams at different frequencies, and

means for delivering said different acoustic signal to said oscilloscope for visual display in different colors.

13. The apparatus of claim 10 wherein said image means includes means to contrast the image corresponding to changes of electrical signals proportional to perturbed acoustical energy by the object in relation to the relative position of said object to said acoustic beam.

14. The apparatus of claim 13 wherein the moving means translates said object through the focal point of said lens in two mutually perpendicular directions.

15. The apparatus of claim 1 including means for moving said object in the direction of the propagating acoustic waves.

16. The apparatus of claim 13 wherein said moving means translates said object in a raster pattern and said detector means includes a CRT display raster synchronized to the translational movement of said object.

32. The apparatus of claim 7 wherein the first acoustic medium has an acoustic velocity of C1 and the fluid medium has an acoustic velocity of C2 and the two media are selected such that the ratio C1/C2 is sufficiently large to substantially eliminate spherical aberration.

17. A microscope for obtaining a two dimensional, pictorial representation of an object of interest by scanning the object with ultrasonic acoustic waves, comprising:

a. a first acoustic medium wherein ultrasonic acoustic waves are propagated;

b. a concavity forming a first acoustic lens at the end of said first propagating medium;

c. means for generating ultrasonic acoustic waves in the first propagating medium, said waves being directed toward the acoustic lens and focused thereby to a waist having a microscopic cross-sectional area, said waves having a frequency of at least 100 MHz;

d. a second acoustic medium wherein ultrasonic waves are collimated;

e. a concavity forming a second acoustic lens at the end of said second propagating medium, said first and second acoustic lenses having coincident foci;

f. transducer means for converting the acoustic waves in the second acoustic medium into electrical signals;

g. a liquid medium in liquid contact with both acoustic lenses and wherein the acoustic waves are focused to a microscope waist;

h. means for moving the object in a plane perpendicular to the direction of the acoustic waves and through the microscopic cross-sectional area of the waist formed by the acoustic lenses so that the object modulates the acoustic waves and the electrical signals from the transducer means converted therefrom; and

i. means for obtaining a two dimensional, high resolution picture of the object wherein the contrast of the picture at predetermined locations corresponds to changes in the phase difference between the electrical signals after conversion of the acoustic waves as modulated by the object and corresponding electrical signals not modulated by the object, said predetermined locations corresponding to the position of the object as determined by the moving means.

18. The apparatus of claim 17 wherein the picture obtaining means includes means for comparing the phase difference between the electrical signals after conversion of the acoustic waves as modulated by the object and the electrical signals not modulated by the object.

19. The apparatus of claim 17 wherein the moving means translates the object in a raster pattern and the picture means includes a CRT display with a raster synchronized with the translation of the object.

20. The apparatus of claim 17 wherein the first and second acoustic media are disposed to reflect acoustic waves from the object and said picture means display an optical density corresponding to the acoustic energy reflected by the object.

21. A microscope for obtaining a two dimensional, pictorial representation of an object of interest by scanning the object with ultrasonic acoustic waves, comprising:

a. a first single-surface acoustic lens assembly having a concave spherical surface at one end with a predetermined focal point;

b. a transmitting transducer attached to the first acoustic lens assembly and generating plane acoustic waves therein, the concave surface of the first acoustic lens focuses the plane acoustic waves to a waist having a microscopic cross-sectional area;

said waves having a frequency of at least 100 MHz;

c. a second single-surface acoustic lens assembly having a concave spherical surface at one end with a predetermined focal point, said first and second lenses being positioned so that their foci are coincident;

d. a liquid medium in liquid contact with both of the acoustic lenses and wherein the acoustic waves are focused to a microscopic waist;

e. means for moving the object in a raster pattern perpendicular to the direction of the acoustic waves and through the microscopic cross-sectional area of the waist formed by the acoustic lenses so that the object modulates the acoustic beam;

f. a detecting transducer attached to the second acoustic lens assembly for receiving the acoustic waves modulated by the object and recollimated by the second acoustic lens, said transducer having output signals corresponding to the modulation of the acoustic waves by the object; and

g. display means having a raster trace synchronized to the raster pattern of the moving means and connected to the detecting transducer so that the output signals therefrom produce a two dimensional, high resolution visual pattern corresponding to the modulation of the acoustic beam by the object.

22. The apparatus of claim 21 wherein the display means produces a visual pattern having a contrast at predetermined locations corresponding to changes in the intensity of the output signals obtained from the detecting transducer, said predetermined locations corresponding to the position of the object as determined by the moving means.

23. The apparatus of claim 21 wherein the display means produces a visual pattern having a contrast at predetermined locations corresponding to changes in the phase difference between the output signals obtained from the detecting transducer and corresponding signals not modulated by the object, said predetermined locations corresponding to the position of the object as determined by the moving means.

33. The apparatus of claim 21 wherein the first acoustic medium has an acoustic velocity of C1 and the fluid medium has an acoustic velocity of C2 and the two media are selected such that the ratio C1/C2 is sufficiently large to substantially eliminate spherical aberration.

25. A microscope for scanning an object with ultrasonic acoustic waves comprising:

a. a first acoustic medium wherein ultrasonic waves are propagated;

b. means forming a plurality of acoustic lenses at the end of the first propagating medium, said acoustic lenses being located in laterally spaced apart relationship;

c. means for generating ultrasonic acoustic waves in the first propagating medium, said waves being directed toward the acoustic lenses and focused therewith;

d. a second acoustic medium wherein ultrasonic acoustic waves are recollimated;

e. means forming a plurality of acoustic lenses at the end of the second propagating medium, each of said acoustic lenses in the first propagating medium having a corresponding acoustic lens in the second propagating medium and each pair of corresponding lenses having coincident foci;

f. means for moving the object in sequence through said acoustic beams;

g. means for detecting the perturbed acoustic energy from each of said beams;

h. means for time delaying the detected acoustic signals in a fashion correlated with the detection intervals;

i. means for combining the detected signals from all of said acoustic beams; and

j. means for displaying the combined signals from all of said beams.

26. A microscope for scanning an object with ultrasonic acoustic waves, comprising:

a. a first acoustic medium wherein ultrasonic waves are propagated;

b. means forming a plurality of acoustic lenses at the end of the first propagating medium;

c. means for generating ultrasonic acoustic waves in the first propagating medium, said waves being directed toward each of said acoustic lenses and focused thereby into a plurality of focal points located on a common plane;

d. a second acoustic medium wherein ultrasonic acoustic waves are recollimated;

e. means forming a plurality of acoustic lenses at the end of the second acoustic medium, each of said acoustic lenses in the first acoustic medium having a corresponding acoustic lens in the second medium and both corresponding lenses having coincident foci;

f. means for moving the object into interception with at least one acoustic beam;

g. means for detecting the acoustic signals resulting from said first and second acoustic beams;

h. means for comparing the phase of the first and second detected acoustic signals; and

i. means for displaying the phase comparisons between said detected acoustic signals.

27. Method for obtaining a two dimensional, pictorial representation of an object of interest by scanning the object with ultrasonic acoustic waves, comprising the steps of:

a. generating acoustic waves having a frequency of at least 100 MHz in an acoustic propagating medium with a transducer;

b. focusing the waves to a waist having a microscopic cross-sectional area with a concave acoustic lens located at one end of the propagating medium;

c. translating the object through a microscopic cross-sectional area of the waist in a raster pattern perpendicular to the direction of the focused acoustic waves;

d. modulating the focused acoustic waves with the translated object;

e. recollimating the acoustic waves modulated by the object;

f. detecting the recollimated acoustic waves with a second transducer; and

g. displaying a two dimensional, high resolution picture of said object wherein said picture has an optical density at predetermined locations thereon corresponding to the detected acoustic waves at corresponding locations on said object.

24. The apparatus of claim 27 wherein the display means includes a CRT display and the output signals from the detecting transducer modulate the intensity of the electron beam of said CRT display.

28. The method of claim 27 further including the step of synchronizing the raster pattern of the translation of the object with the display of the picture, said display having a corresponding raster.

31. A method as in claim 27 for obtaining a pictorial representation of an object of biological origin wherein the step of focusing includes focusing the acoustic waves on an object of biological origin and the step of translating includes translating an object of biological origin in a raster pattern.

29. The acoustic microscope of claim 47 including a second solid acoustic propagating medium wherein said acoustic energy waves are recollimated, means for forming a second acoustic lens at the end of said second propagating medium, said first and second acoustic lenses having coincident foci, and transducer means for converting the acoustic energy waves in the second acoustic medium into electrical signals and said fluid medium is in contact with both acoustic lenses whereby said reflected acoustic energy is isolated from said transmitted energy.

30. An acoustic microscope for producing an image of an object of interest utilizing high frequency acoustic wave energy, comprising:

a. transducer means for generating acoustic energy at a frequency of at least 100 MHz.

b. means forming a solid acoustic energy propagating medium having a predetermined acoustic velocity C1 disposed adjacent said acoustic energy generating means, said transducer means and propagating medium forming a collimated beam of acoustic energy;

c. a first acoustic lens means disposed adjacent the other end of said acoustic energy propagating medium, said acoustic means forming a focal point outside of said acoustic energy propagating means, said lens having a predetermined f number;

d. a fluid acoustic energy propagating medium having a predetermined acoustic velocity C2, disposed adjacent said acoustic lens means and within which the focal point of said acoustic lens means occurs and within which an object to be observed may be positioned, said fluid medium having an acoustic velocity to provide a wavelength of said acoustic energy of about 15 microns or less in said medium and substantially less than the acoustic velocity of said acoustic energy propagating medium, said velocity C1 and C2 being chosen such that their ratio produces an acoustical optical system having negligible spherical aberration;

e. means for moving, relatively, said object to be observed with respect to the beam such that the focal point of said acoustic lens occurs on the surface or within the object to be observed;

f. a second acoustic lens in said propagating medium at a position to receive acoustic energy reflected from the object; and

g. transducer means operatively connected to said second acoustic lens for detecting the acoustic energy perturbed by said object so that an image of the object of interest is obtainable.

34. An acoustic microscope for producing an image of an object of interest utilizing high frequency acoustic wave energy, comprising:

a. transducer means for generating acoustic energy at a frequency of at least 100 MHz and for detecting acoustic energy reflected from the object;

b. means forming a solid acoustic energy propagating medium having a predetermined acoustic velocity C1 disposed adjacent said acoustic energy generating means, said transducer means and propagating medium forming a collimated beam of acoustic energy;

c. an acoustic lens means disposed adjacent the other end of said acoustic energy propagating medium, said acoustic lens means forming a focal point outside of said acoustic energy propagating means, said lens having a predetermined f number and receives acoustic energy reflected from the object;

d. a fluid acoustic energy propagating medium having a predetermined acoustic velocity C2, disposed adjacent said acoustic lens means and within which the focal point of said acoustic lens means occurs and within which an object to be observed may be positioned, said fluid medium having an acoustic velocity to provide a wavelength of said acoustic energy of about 15 microns or less in said medium and substantially less than the acoustic velocity of said acoustic energy propagating medium, said velocity C1 and C2 being chosen such that their ratio produces an acoustical optical system having negligible spherical aberration; and

e. means for moving, relatively, said object to be observed with respect to the beam such that the focal point of said acoustic lens occurs on the surface or within the object to be observed, said transducer means being disposed on said acoustical energy propagating medium, in alignment with said lens and said object so that an image of the object of interest is obtainable.