×

High density wafer contacting and test system

  • US 4,038,599 A
  • Filed: 12/30/1974
  • Issued: 07/26/1977
  • Est. Priority Date: 12/30/1974
  • Status: Expired due to Term
First Claim
Patent Images

1. A space transformer for use in an electronic test system for testing micro-miniature electronic devices, said space transformer comprising:

  • a monolithic silicon structure;

    said silicon structure containing, a first binary decoder circuit adapted to receive a first set of m binary inputs and provide a first set of 2m binary outputs, a second binary decoder circuit adapted to receive a second set of m binary inputs and provide a second set of 2m binary outputs, a third binary decoder circuit adapted to receive a third set of m binary inputs and provide a third set of 2m binary outputs, a fourth binary decoder circuit adapted to receive a fourth set of m binary inputs and provide a fourth set of 2m binary outputs, where m may be any integer number, a plurality of logic circuits selectively connected to said outputs of said first, second, third and fourth binary decoders, an array of exposed conductive pads connected to said plurality of logic circuits.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×