High density wafer contacting and test system
First Claim
1. A space transformer for use in an electronic test system for testing micro-miniature electronic devices, said space transformer comprising:
- a monolithic silicon structure;
said silicon structure containing, a first binary decoder circuit adapted to receive a first set of m binary inputs and provide a first set of 2m binary outputs, a second binary decoder circuit adapted to receive a second set of m binary inputs and provide a second set of 2m binary outputs, a third binary decoder circuit adapted to receive a third set of m binary inputs and provide a third set of 2m binary outputs, a fourth binary decoder circuit adapted to receive a fourth set of m binary inputs and provide a fourth set of 2m binary outputs, where m may be any integer number, a plurality of logic circuits selectively connected to said outputs of said first, second, third and fourth binary decoders, an array of exposed conductive pads connected to said plurality of logic circuits.
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Accused Products
Abstract
A contactor structure employed in a high speed electronic test system for testing the electrical integrity of the conductive paths (or lines) in the packaging substrate prior to the mounting and connection thereto of the high circuit density monolithic devices. The contactor structure includes a semiconductor space transformer fabricated by large scale integration techniques and containing a plurality of discrete first integrated circuits. The first integrated circuits of the space transformer being respectively electrically connected to said electrical probes. Second integrated circuitry interconnecting said first integrated circuits is also contained within said semiconductor space transformer. Under control of said test system said second integrated circuitry selectively energizes, selected first and second ones of said first integrated circuits. Each of said first integrated circuits contains circuitry, whereby said selected first and second ones of said first circuits will manifest the electrical integrity of the electrical path there between.
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Citations
5 Claims
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1. A space transformer for use in an electronic test system for testing micro-miniature electronic devices, said space transformer comprising:
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a monolithic silicon structure; said silicon structure containing, a first binary decoder circuit adapted to receive a first set of m binary inputs and provide a first set of 2m binary outputs, a second binary decoder circuit adapted to receive a second set of m binary inputs and provide a second set of 2m binary outputs, a third binary decoder circuit adapted to receive a third set of m binary inputs and provide a third set of 2m binary outputs, a fourth binary decoder circuit adapted to receive a fourth set of m binary inputs and provide a fourth set of 2m binary outputs, where m may be any integer number, a plurality of logic circuits selectively connected to said outputs of said first, second, third and fourth binary decoders, an array of exposed conductive pads connected to said plurality of logic circuits. - View Dependent Claims (2, 3, 4, 5)
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Specification