Plurality of precise temperature resistors formed in monolithic integrated circuits

• US 4,044,371 A
• Filed: 09/29/1976
• Issued: 08/23/1977
• Est. Priority Date: 09/29/1976
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Daughton, James M., Abdelrahman, Mona M.
• Primary Examiner(s): James, Andrew J.
• Application Number:
  US05/727,736
• Time in Patent Office: 328 Days
• Field of Search: 357/48, 357/47, 357/50, 357/51, 357/28, 357/91, 338/2, 338/7, 338/9
• US Class Current: 257/467
• CPC Class Codes: H01L 27/0802 Resistors only
• CPC Class Codes: H10N 19/00 Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
• CPC Class Codes: Y10S 148/136 Resistors

Abstract

A precision sensistor structure is disclosed for use in a monolithic integrated circuit.

Claims

1. A monolithic integrated circuit sensistor provided in a semiconductor material of a selected total resistance having a selected temperature coefficient of resistance and having a voltage coefficient of resistance which is less than a selected value, said sensistor comprising:

a set of n isolated regions in said semiconductor material, each of a first conductivity type;

a set of n resistor regions, each of a second conductivity type which is determined by ions implanted therein in a selected dose to provide said temperature coefficient of resistance, each of said resistor regions being located in a corresponding one of said isolated regions with a semiconductor junction occurring between each said resistor region and its corresponding isolated region and each of said resistor regions having a first end and a second end; and

an interconnection network means electrically connecting each of said resistor regions in series with one another at said first and second ends in a resistor string and further adapted to electrically connect said resistor string into a circuit, said interconnection network means directly electrically connecting said first end of each said resistor region to its corresponding isolated region, a value for n being selected of two or more to be sufficiently large to reduce said voltage coefficient of resistance to being less than said selected value.

2. The apparatus of claim 1 wherein said network interconnection means is of aluminim, said direct electrical contact in each of said isolated regions being made through a contact region therein of said first conductivity type but of a higher conductivity than that of said isolated regions.

3. The apparatus of claim 2 wherein each said resistor region has a resistance value between said first and second ends substantially equal to that of every other said resistor region.

4. The apparatus of claim 2 wherein each of said isolated regions has a buried layer region provided between it and a substrate on which said isolated regions are formed, said buried layer region being of said first conductivity type.

5. The apparatus of claim 4 wherein said isolated regions are formed in an epitaxial layer grown on said substrate.

6. The apparatus of claim 4 wherein said network interconnection means is of aluminum, said direct electrical contact in each of said isolated regions being made through a contact region therein of said first conductivity type but of a higher conductivity than that of said isolated regions.