Ripple-free dichroic mirrors
First Claim
Patent Images
1. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 10-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 10-layer films being composed of alterating layers of a high index material having an index of refraction of 2.20 and a low index material having an index refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (2.85/4) λ
o, the optical thickness of said second layer is (0.8/4) λ
o, and the optical thickness of said outermost layers if (1.6/4) λ
o.
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Abstract
A dichroic mirror is made up of alternating layers of a material having a high index of refraction and a material having a low index of refraction arranged in a stack on one surface of a substrate. The dichroic mirror is effective to separate light in the visible spectrum range, incident thereupon, into two components, one of which is transmitted and the other of which is reflected. Each of the first, second and last layers in the stack, counting outwardly from the substrate, is controlled to an optical thickness deviated from an odd number of quarter-wavelengths of a design wavelength in air, to effect a uniform distribution of transmittance coefficients over the transmitted components.
65 Citations
18 Claims
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1. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 10-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 10-layer films being composed of alterating layers of a high index material having an index of refraction of 2.20 and a low index material having an index refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (2.85/4) λ
o, the optical thickness of said second layer is (0.8/4) λ
o, and the optical thickness of said outermost layers if (1.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
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2. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 11-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 11-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (2.8/4) λ
o, the optical thickness of said second layer is (0.8/4) λ
o, and the optical thickness of said outermost layer is (2.7/4) λ
.sub. o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
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3. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 10-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 10-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (3.1/4) λ
o, the optical thickness of said second layer is (1.1/4) λ
o, and the optical thickness of said outermost layer is (0.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
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4. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 11-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 11-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.6/4) λ
o, the optical thickness of said second layer is (1.2/4) λ
o, and the optical thickness of said outermost layers if (1.5/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
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5. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 11-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 11-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (3.2/4) λ
o, the optical thickness of said second layer is (1.2/4) λ
o, and the optical thickness of said outermost layer is (3.15/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
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6. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 12-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 12-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer is (2.8/4) λ
o, and the optical thickness of said outermost layers if (2.7/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
7. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 11-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 11-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer is (2.9/4) λ
o, and the optical thickness of said outermost layers if (1.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
8. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 12-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 12-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.3/4) λ
o, the optical thickness of said second layer is (1.5/4) λ
o, and the optical thickness of said outermost layers is (1.5/4) λ
.sub. o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
9. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 12-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 12-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, wherein the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.3/4) λ
o, the optical thickness of said second layer is (3.15/4) λ
o, and the optical thickness of said outermost layers is (3.3/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
10. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 11-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 11-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 3/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.2/4) λ
o, the optical thickness of said second layer is (3.1/4) λ
o, and the optical thickness of said outermost layers if (0.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
11. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 14-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 14-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer if (0.8/4) λ
o, and the optical thickness of said outermost layers is (1.9/4) λ
.sub. o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
12. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 15-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 15-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer is (0.8/4) λ
o, and the optical thickness of said outermost layers if (0.5/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
13. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 14-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 14-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.2/4) λ
o, the optical thickness of said second layer is (1.15/4) λ
o, and the optical thickness of said outermost layers is (0.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
14. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 13-layer films coated wover said substrate, said substrate having an index of refraction of 1.52, and said 13-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a high index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.25/4) λ
o, the optical thickness of said second layer is (1.1/4) λ
o, and the optical thickness of said outermost layers is (1.3/4) λ
.sub. o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
15. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 14-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 14-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer is (0.6/4) λ
o, and the optical thickness of said outermost layer is (0.5/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
16. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 13-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 13-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with substrate is a low index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (0.6/4) λ
o, the optical thickness of said second layer is (0.6/4) λ
o, and the optical thickness of said outermost layers is (1.8/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
17. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 14-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 14-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate have optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is 1.3/4 λ
o, the optical thickness of said second layer is 1.25/4 λ
o, and the optical thickness of said outermost layers is 1.3/4 λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
-
18. A dichroic mirror, in which ripple is eliminated, consisting of a substrate and 13-layer films coated over said substrate, said substrate having an index of refraction of 1.52, and said 13-layer films being composed of alternating layers of a high index material having an index of refraction of 2.20 and a low index material having an index of refraction of 1.38, and the layer contacting with said substrate is a low index material, said high index layers each having a basic design optical thickness of 1/4λ
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
o, wherein λ
o is a design wave length in air, whereby the first, the second and the outermost layers counting from the substrate having optical thickness slightly deviated from the corresponding basic optical thickness, the optical thickness of said first layer is (1.3/4) λ
o, the optical thickness of said second layer is (1.25/4) λ
o, and the optical thickness of said outermost layers is (0.6/4) λ
o.
-
o, and said low index layers each having a basic design optical thickness of 1/4λ
Specification
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Current AssigneeCanon Kabushiki Kaisha (Canon Inc.)
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Original AssigneeCanon Kabushiki Kaisha (Canon Inc.)
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InventorsSekimura, Nobuyuki
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Primary Examiner(s)Henry, Jon W.
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Application NumberUS05/598,219Time in Patent Office783 DaysField of Search350/163-166, 350/171, 427/166US Class Current359/586CPC Class CodesG02B 27/1006 for splitting or combining ...G02B 27/142 Coating structures, e.g. th...G02B 5/0825 the reflecting layers compr...G02B 5/285 comprising deposited thin s...
