Method of producing a light transmitting absorbing coating on substrates

• US 4,048,039 A
• Filed: 10/21/1976
• Issued: 09/13/1977
• Est. Priority Date: 03/07/1975
• Status: Expired due to Term

• Current Assignee: Balzers Patent und Beteiligungs AG
• Original Assignee: Balzers Patent und Beteiligungs AG
• Inventors: Daxinger, Helmut
• Primary Examiner(s): Mack, John H.
• Assistant Examiner(s): Weisstuch, Aaron
• Application Number:
  US05/734,394
• Time in Patent Office: 327 Days
• Field of Search: 204/192 P, 428/428, 428/450, 427/167
• US Class Current: 204/192.28
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3613 Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
• CPC Class Codes: C03C 17/3639 Multilayers containing at least two functional metal layers
• CPC Class Codes: C03C 17/3649 made of metals other than silver
• CPC Class Codes: C03C 17/3657 the multilayer coating having optical properties
• CPC Class Codes: C03C 17/3681 the multilayer coating being used in glazing, e.g. windows or windscreens
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C23C 14/0073 by exposing the substrates to reactive gases intermittently
• CPC Class Codes: C23C 14/10 Glass or silica
• CPC Class Codes: C23C 14/18 on other inorganic substrates
• CPC Class Codes: F24S 70/20 characterised by absorbing coatings; characterised by surface treatment for increasing absorption
• CPC Class Codes: G02B 1/10 Optical coatings produced by application to, or surface treatment of, optical elements G02B1/08 takes precedence
• CPC Class Codes: Y02E 10/40 Solar thermal energy, e.g. solar towers

Abstract

A light transmitting, absorbing coating is produced on a substrate by depositing by cathode sputtering alternate layers of silicon in an oxidizing residual gas atmosphere and chrome in a non-oxidizing residual gas atmosphere. The light transmitting layer comprises a substrate having a coating of a bluish-grey transmission color which comprises a plurality of alternate chrome and silicon dioxide layers with the thickness of the individual chrome layers being smaller than 10 nm.

Claims

1. A method of producing a light transmitting, absorbing coating on a substrate, comprising depositing by cathode sputtering, alternate layers of silicon and chrome, with the silicon being deposited in an oxidizing residual gas atmosphere and the chrome in a non-oxidizing residual gas atmosphere.

2. A method according to claim 1, wherein the chrome is sputtered in an argon atmosphere.

3. A method according to claim 1, wherein nineteen layers are applied with the silicon layer being located adjacent the substrate.

4. A method according to claim 1, wherein the chrome layers are deposited by sputtering metallic chrome in pure argon at a pressure of 8×

10^-4.

5. A method according to claim 1, wherein the silicon layers are produced by sputtering silicon in an oxidizing atmosphere comprising an argon-oxygen mixture at a total pressure of 8×

10^-4 torr and at an oxygen partial pressure of 2×

10^-4 torr, and in which the silicon layer is deposited to a thickness of 40 nm.

6. A method according to claim 1, including combining the coating thus formed which is of a blue transparency with further layers of brownish-yellow transmission color.

7. A method according to claim 6, wherein the further layers of brownish-yellow transmission color comprise layers of copper.

8. A method according to claim 6, wherein the coating formed is of bluish transmission color and includes adding a further layer of a neutral substance, such as nickel.