Vacuum pump having a rotor supported in the interior of its casing
First Claim
Patent Images
1. A vacuum pump for generating high vacuums free of lubricating vapors, said pump comprising:
- a housing having a horizontal extent, said housing including a vacuum intake chamber and at least one outlet means,a rotor structure supported horizontally along the horizontal extent of said housing, said rotor structure including a shaft and a plurality of rotor vanes mounted on said shaft, said plurality of rotor vanes being in cooperation with a plurality of stator vanes mounted in said housing, and said plurality of rotor and stator vanes being arranged between said intake chamber and said outlet means,an electric motor means mounted in said housing for rotation said rotor structure, andelectromagnetic support means for rotatably supporting said rotor structure in said housing, said electromagnetic support means supporting said rotor structure both axially and radially,wherein said electromagnetic support means includes a plurality of radially mounted magnetic cores on said shaft and a plurality of electromagnets mounted in said housing in operative relationship with said plurality of radial magnetic cores for providing radial support of said rotor structure,wherein said electromagnetic support means further includes at least one axial magnetic core mounted on the end face of said shaft and at least one electromagnet mounted in said housing in operative relationship to said axial magnetic core for providing axial support for said rotor structure, each of said electromagnets of said magnetic support means being electrically energized separately;
wherein said horizontally supported rotor structure includes two journal shafts extending from a central rotor hub, a portion of said plurality of rotor vanes being mounted on each of said two journal shafts and a portion of said stator vanes being mounted in said horizontally extending housing to be in cooperation with said rotor vanes on each journal shaft;
wherein said electric motor means includes a rotor means and a stator means, said rotor means being mounted on one of said two journal shafts, and said stator means being mounted in said housing in operative relationship to said rotor means; and
wherein said plurality of radially mounted magnetic cores includes two annular, laminated magnetic cores, each of said annular cores being mounted on each of said two journal shafts, and said plurality of electromagnets is mounted in said housing in operative relationship to each of said annular magnetic cores, and wherein said at least one axial magnetic core is mounted within the end face of each journal shaft and said at least one electromagnet is mounted in said housing in operative relationship to said axial magnetic cores in each respective end face of said journal shafts.
0 Assignments
0 Petitions
Accused Products
Abstract
The present invention relates to magnetic support of the rotor structure in vacuum pumps, particularly turbomolecular pumps. This magnetic support eliminates the requirements for bearing lubricants, and the consequent degradation of the vacuum to be produced by lubricant vapors.
72 Citations
15 Claims
-
1. A vacuum pump for generating high vacuums free of lubricating vapors, said pump comprising:
-
a housing having a horizontal extent, said housing including a vacuum intake chamber and at least one outlet means, a rotor structure supported horizontally along the horizontal extent of said housing, said rotor structure including a shaft and a plurality of rotor vanes mounted on said shaft, said plurality of rotor vanes being in cooperation with a plurality of stator vanes mounted in said housing, and said plurality of rotor and stator vanes being arranged between said intake chamber and said outlet means, an electric motor means mounted in said housing for rotation said rotor structure, and electromagnetic support means for rotatably supporting said rotor structure in said housing, said electromagnetic support means supporting said rotor structure both axially and radially, wherein said electromagnetic support means includes a plurality of radially mounted magnetic cores on said shaft and a plurality of electromagnets mounted in said housing in operative relationship with said plurality of radial magnetic cores for providing radial support of said rotor structure, wherein said electromagnetic support means further includes at least one axial magnetic core mounted on the end face of said shaft and at least one electromagnet mounted in said housing in operative relationship to said axial magnetic core for providing axial support for said rotor structure, each of said electromagnets of said magnetic support means being electrically energized separately; wherein said horizontally supported rotor structure includes two journal shafts extending from a central rotor hub, a portion of said plurality of rotor vanes being mounted on each of said two journal shafts and a portion of said stator vanes being mounted in said horizontally extending housing to be in cooperation with said rotor vanes on each journal shaft; wherein said electric motor means includes a rotor means and a stator means, said rotor means being mounted on one of said two journal shafts, and said stator means being mounted in said housing in operative relationship to said rotor means; and wherein said plurality of radially mounted magnetic cores includes two annular, laminated magnetic cores, each of said annular cores being mounted on each of said two journal shafts, and said plurality of electromagnets is mounted in said housing in operative relationship to each of said annular magnetic cores, and wherein said at least one axial magnetic core is mounted within the end face of each journal shaft and said at least one electromagnet is mounted in said housing in operative relationship to said axial magnetic cores in each respective end face of said journal shafts.
-
-
2. A vacuum pump for generating high vacuums free of lubricating vapors, said pump comprising:
-
a housing having a horizontal extent, said housing including a vacuum intake chamber and at least one outlet means, a rotor structure supported horizontally along the horizontal extent of said housing, said rotor structure including a shaft and a plurality of rotor vanes mounted on said shaft, said plurality of rotor vanes being in cooperation with a plurality of stator vanes mounted in said housing, and said plurality of rotor and stator vanes being arranged between said intake chamber and said outlet means, an electric motor means mounted in said housing for rotating said rotor structure, and electromagnetic support means for rotatably supporting said rotor structure in said housing, said electromagnet support means supporting said rotor structure both axially and radially, wherein said electromagnetic support means includes a plurality of radially mounted magnetic cores on said shaft and a plurality of electromagnets mounted in said housing in operative relationship with said plurality of radial magnetic cores for providing radial support of said rotor structure, wherein said electromagnetic support means further includes at least one axial magnetic core mounted on the end face of said shaft and at least one electromagnet mounted in said housing in operative relationship to said axial magnetic core for providing axial support for said rotor structure, each of said electromagnets of said magnetic support means being electrically energized separately; and wherein said plurality of radially mounted magnetic cores includes a first plurality of laminated annular magnetic cores mounted on said shaft adjacent a first end face of said shaft and a second plurality of laminated annular magnetic cores mounted on said shaft adjacent a second end face of said shaft, and wherein said at least one axial magnetic core includes a first axial magnetic core mounted in said first end face and a second axial magnetic core mounted in said second end face. - View Dependent Claims (3, 4, 5, 6, 7)
-
-
8. A vacuum pump for generating high vacuums free of lubricating vapors, said pump comprising:
-
a housing, said housing including a vacuum intake chamber and at least one outlet means, a rotor structure supported in said housing, said rotor structure including a shaft and a plurality of rotor vanes mounted on said shaft, said plurality of rotor vanes being in cooperation with a plurality of stator vanes mounted in said housing, and said plurality of rotor and stator vanes being arranged between said intake chamber and said outlet means, an electric motor means mounted in said housing for rotating said rotor structure, and electromagnetic support means for rotatably supporting said rotor structure in said housing, said electromagnetic support means supporting said rotor structure both axially and radially, wherein said electromagnetic support means includes a first annular laminated magnetic core and a second annular laminated magnetic core mounted on said shaft, and a plurality of radial electromagnets mounted in said housing in operative relationship with each of said first and second annular laminated magnetic cores for providing contact-free radial support of said rotor structure within said housing, and wherein said electromagnetic support means further includes at least one axial magnetic core mounted in each end face of said shaft, and at least one axial electromagnet mounted in said housing in operative relationship to each of said axial magnetic cores at the ends of said shaft for providing contact-free axial support for said rotor structure within said housing. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
-
Specification