High fidelity pressure transducer
First Claim
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1. A fluid pressure transducer comprising:
- a quartz body having a body electrode of electrically conductive material; and
a deflectable quartz diaphragm peripherially coupled to the body and having a ring shaped sensing electrode of electrically conductive material disposed on and substantially limited to the inflection circle of the diaphragm for capacitive coupling with the body electrode to form a sensing capacitor;
said diaphragm being deflected by fluid pressure fluctuations to change the capacitance of the sensing capacitor in substantially linear proportion to such fluctuations.
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Abstract
The capacitive fluid pressure transducers described herein comprise quartz bodies and diaphragms having suitable electrodes deposited thereon to form both sensing and reference capacitors in appropriate configurations for high fidelity measurement of relative blood pressure, said transducers being substantially unaffected by temperature and other environment factors.
58 Citations
5 Claims
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1. A fluid pressure transducer comprising:
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a quartz body having a body electrode of electrically conductive material; and a deflectable quartz diaphragm peripherially coupled to the body and having a ring shaped sensing electrode of electrically conductive material disposed on and substantially limited to the inflection circle of the diaphragm for capacitive coupling with the body electrode to form a sensing capacitor; said diaphragm being deflected by fluid pressure fluctuations to change the capacitance of the sensing capacitor in substantially linear proportion to such fluctuations. - View Dependent Claims (2, 3, 4, 5)
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Specification