Capacitive pressure sensing device
First Claim
1. A pressure sensing device comprising:
- A. a pair of dielectric disc elements, each having at least one nominally planar surface peripherally bounded by a predetermined curve, said disc elements being fused together at their peripheral boundary to form a hollow monolithic capsule having nominally planar opposed inner surfaces, wherein said opposed inner planar surfaces are mutually separated by a uniform, predetermined gap near said peripheral boundary and by a distance related to the difference in pressure exterior and interior to said capsule otherwise, and wherein said capsule includes inner conductive film members disposed on opposed portions of said opposed inner surfaces, andB. coupling means for electrically coupling said inner film members to conductive terminal elements exterior to said capsule,wherein the outer surface of said capsule has an outer conductive film member disposed on a portion thereof opposite each inner conductive film member, each of said outer conductive film members being in good electrical contact with one of said terminal elements.
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Abstract
A pressure sensing device and method of construction therefor. The device includes at least two dielectric discs which are fused together at their peripheral boundary to form a hollow monolithic capsule having two nominally planar opposed inner surfaces. The opposed inner surfaces of the capsule are mutually separated by a uniform gap near the peripheral boundary and by a distance related to the difference in pressure interior and exterior to the capsule otherwise. Conductive films are disposed on opposed portions of the inner surfaces of the capsule. The device further includes a means for electrically coupling each of the conductive films to an associated terminal exterior to the capsule. The capacitance between these terminals is related to the above-mentioned pressure differential.
97 Citations
33 Claims
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1. A pressure sensing device comprising:
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A. a pair of dielectric disc elements, each having at least one nominally planar surface peripherally bounded by a predetermined curve, said disc elements being fused together at their peripheral boundary to form a hollow monolithic capsule having nominally planar opposed inner surfaces, wherein said opposed inner planar surfaces are mutually separated by a uniform, predetermined gap near said peripheral boundary and by a distance related to the difference in pressure exterior and interior to said capsule otherwise, and wherein said capsule includes inner conductive film members disposed on opposed portions of said opposed inner surfaces, and B. coupling means for electrically coupling said inner film members to conductive terminal elements exterior to said capsule, wherein the outer surface of said capsule has an outer conductive film member disposed on a portion thereof opposite each inner conductive film member, each of said outer conductive film members being in good electrical contact with one of said terminal elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pressure sensing device comprising:
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A. a pair of dielectric disc elements, each having at least one nominally planar surface peripherally bounded by a predetermined curve, said disc elements being fused together at their peripheral boundary to form a hollow monolithic capsule having nominally planar opposed inner surfaces, wherein said opposed inner surfaces are mutually separated by a uniform, predetermined gap near said peripheral boundary and by a distance related to the difference in pressure exterior and interior to said capsule otherwise, and wherein said capsule includes inner conductive film members disposed on opposed portions of said opposed inner surfaces, and B. coupling means for electrically coupling said inner film members to conductive terminal elements exterior to said capsule, wherein said capsule includes a channel passing through each of said disc elements, wherein said inner conductive film members extend continuously from the respective opposed inner surfaces to the inner surface of said channel and to a portion of the outer surface of said capsule, and are in relatively good electrical contact with a respective one of said terminal elements, and wherein said capsule further includes a cover member for overlaying at least one of said channels, said cover member being affixed to the outer surface of said capsule and forming a gas-tight seal between the region exterior to said capsule and the region interior to said channel. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A pressure sensing device comprising:
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A. three dielectric disc elements, each having at least one nominally planar surface peripherally bounded by a predetermined curve, said disc elements being fused together at their peripheral boundary to form a monolithic capsule having a first and second interior chamber, wherein said first chamber is bounded by a first and second of said disc elements, and said second chamber is bounded by said second and the third of said disc elements, said first chamber having nominally planar opposed inner surfaces, said opposed inner surfaces being mutually separated by a uniform predetermined gap near said peripheral boundary and by a distance related to the difference in pressure in said two chambers otherwise, and wherein said first chamber includes inner conductive film members disposed on opposed portions of said opposed inner surfaces, B. electrical coupling means for electrically coupling said inner film members to conductive terminal elements exterior to said capsule, and C. a medium coupling means for coupling an external medium to said second chamber whereby said external medium is isolated from said electrical coupling means. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification