Method for depositing film on a substrate
First Claim
1. The method of depositing and implanting a film on a substrate within an airtight enclosure comprising the steps of:
- exhausting the atmosphere from said enclosure to maintain a high vacuum;
emitting ionized molecular particles from a source of material to be deposited;
directing the molecular particles to a region adjacent a plurality of electrodes shaped to develop field emission of charged particles;
applying potentials to said shaped electrodes to establish electric fields sufficient to cause the electrodes to emit charged particles into said region for further ionizing said molecular particles after emission from said source of material; and
accelerating and directing the ionized molecular particles to a specimen remote from said source material with sufficient energy to implant a film of said molecular particles on said specimen to a selected depth of penetration and thickness.
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Accused Products
Abstract
Method and apparatus for use of emitting, ionizing, accelerating and collecting elements in a high vacuum to implant a hard film on a plastic substrate or the like. In preparation, a slug of a selected material to be deposited as a film is placed in the emitter. The specimens or articles to be implanted are placed on supports in the vicinity of the collector. A cover enclosure is then placed in position and the region enclosed by the cover is exhausted to a high vacuum. Selected potentials are applied to various elements of the apparatus and an accelerating/directing field, which may be developed electrostatically, magnetically or by a combination of both, is developed in the acceleration structure. The electrostatic field causes electron emission from the ionizing elements to develop an increased charge on the emitted ionized particles. When implantation is to begin, a shutter control is moved out of beam blocking position and ionized particles from the emitter pick up additional charge from the ionizing elements and are accelerated to high velocity for bombarding the specimens. The collector is provided near the end of the enclosure beyond the specimen support region. The specimens are discharged regularly to eliminate the build-up of surface charge from the stream of bombarding ions.
119 Citations
17 Claims
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1. The method of depositing and implanting a film on a substrate within an airtight enclosure comprising the steps of:
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exhausting the atmosphere from said enclosure to maintain a high vacuum; emitting ionized molecular particles from a source of material to be deposited; directing the molecular particles to a region adjacent a plurality of electrodes shaped to develop field emission of charged particles; applying potentials to said shaped electrodes to establish electric fields sufficient to cause the electrodes to emit charged particles into said region for further ionizing said molecular particles after emission from said source of material; and accelerating and directing the ionized molecular particles to a specimen remote from said source material with sufficient energy to implant a film of said molecular particles on said specimen to a selected depth of penetration and thickness. - View Dependent Claims (2, 3, 4)
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5. The method of fabricating a tinted plastic transparent device having a hardened film coating comprising the steps of:
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emitting particles from a source of material containing the tinting substance; ionizing said particles after emission from said source; accelerating and directing said particles to said device for implanting a hardened tinted film thereon; and exposing said device to ultraviolet radiation to develop the desired tint in said film. - View Dependent Claims (6, 7, 8)
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9. The method of developing fire resistant properties for an article having a combustible surface material comprising the steps of:
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placing said article in a vacuum chamber for molecular bombardment therein; emitting ionized molecular particles from a source of mineral material to be deposited on the surface of said article; further ionizing said particles by field emission after said emission from said source; and accelerating and directing said particles to said article with sufficient energy to implant a film of deposited mineral material on the surface of said article to a sufficient depth of penetration and thickness to prevent oxidation of the combustible surface material. - View Dependent Claims (10, 11)
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12. The method of implanting a protective film on a substrate comprising:
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utilizing a set of interrelated means for emitting, electric field induced ionizing, accelerating and directing particles of a selected material to a predetermined collector region containing the substrate remote from the emitting means in order to implant the ionized particles in said substrate and deposit a film thereon, the utilizing step including directing an electron beam to a source of said material to cause emission of said material particles with at least some of them being ionized and applying electrical potentials to a plurality of electrodes in said interrelated means which are shaped to develop field emission of charged particles in order to cause said field emission to further ionize the selected material particles; maintaining a high vacuum in the vicinity of the set of interrelated means and the collector region; and controlling the selective application of electrical potentials to the set of interrelated means in order to control the electric field induced ionizing and the implantation and deposition of said film.
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13. The method of implanting ionized particles of a selected material on a specimen surface and building up a film thereon, the method comprising:
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mounting the specimen in a first region within an airtight enclosure; mounting a slug of said material in a second region within said enclosure remote from the first region; directing a beam of electrons to impinge said slug to cause vaporization and emission of particles therefrom, at least some of which are ionized by said electrons; selectively applying potentials to an accelerating and directing structure within said enclosure intermediate the first and second regions to develop a controlled electrostatic field for accelerating the ionized particles toward the specimen and implanting the ionized particles to a predetermined depth therein; building up a layer of said material of a predetermined thickness on the implanted surface of the specimen; and carrying out all of said steps within said enclosure evacuated to a high vacuum. - View Dependent Claims (14, 15, 16, 17)
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Specification