Alignment pattern detecting apparatus

• US 4,115,762 A
• Filed: 11/30/1977
• Issued: 09/19/1978
• Est. Priority Date: 12/01/1976
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Oshima, Yoshimasa, Akiyama, Nobuyuki
• Primary Examiner(s): Boudreau, Leo H.
• Application Number:
  US05/856,096
• Time in Patent Office: 293 Days
• Field of Search: 340/146.3 H, 340/146.3 Q, 340/146.3 AQ, 340/146.3 P, 340/146.3 F, 250/221, 250/201, 364/559
• US Class Current: 382/151
• CPC Class Codes: G01B 11/022 by means of tv-camera scanning

Abstract

An alignment pattern detecting apparatus comprises an image pick-up device for scanning and picking up an optical image of alignment pattern formed on a wafer to produce a time-base video signal, and means for sampling at predetermined intervals and converting from analog to digital form the video signal produced by the image pick-up device so that the video signal is returned symmetrically at a predetermined point to determine the degree of matching between the two signals thereby to obtain a point where the degree of matching is the best. This best matching degree point is detected as the center position of the alignment pattern.

Claims

1. An alignment pattern detecting apparatus comprising an image pick-up device for scanning and picking up an optical image of a registration pattern formed on a wafer, the direction of the scanning being in a direction transverse to the lengthwise direction of the pattern, and means for symmetrically returning a video signal obtained from said image pick-up device to determine the degree of matching of said video signal with the video signal returned and for determining a return point associated with the best matching to detect said return point as the center of said alignment pattern.

2. An alignment pattern detecting apparatus according to claim 1, in which said means operates in such a manner that said video signal is sampled at regular coordinate intervals thereby to determine the associated signal levels y(x₁) to y(x_n), said signal levels y(x₁) to y(x_n) being returned symmetrically at a predetermined point (x_i) thereby to determine the symmetric function ##EQU6## where γ

is a natural number and m a given natural number, thereby determining a point representing the minimum value of said symmetric function z₁ (x_i).

3. An alignment pattern detecting apparatus according to claim 2, in which said value γ

is not less than two.

4. An alignment pattern detecting apparatus according to claim 1, in which said means operates in such a manner that said video signal is sampled at regular coodinate intervals thereby to determine the associated signal levels y(x₁) to y(x_n), said means producing a difference signal d(x_t) of said signal levels y(x₁) to y(x_n), said difference signal being returned at a predetermined point (x_i) thereby to determine the symmetric function ##EQU7## where γ

is a natural number and m a given natural number, thereby determining a point representing the minimum value of said symmetric function z₂ (x_i).

5. An alignment pattern detecting apparatus according to claim 4, in which said value γ

is not less than two.