×

Cryopump having improved heat radiation shielding

  • US 4,121,430 A
  • Filed: 05/04/1977
  • Issued: 10/24/1978
  • Est. Priority Date: 05/11/1976
  • Status: Expired due to Term
First Claim
Patent Images

1. In a cryopump of a housing presenting an entrance opening defined by a plane for passage of molecules of a gas to be pumped, a member arranged to be brought to low temperature and presenting planar condensation surfaces for molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, the improvement wherein said member is positioned so that said condensation surfaces are substantially at right angles to the plane of the entrance opening, and said radiation shield comprises a plurality of elongated metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×