Cryopump having improved heat radiation shielding

• US 4,121,430 A
• Filed: 05/04/1977
• Issued: 10/24/1978
• Est. Priority Date: 05/11/1976
• Status: Expired due to Term

• Current Assignee: Leybold Vacuum Products Incorporated (Atlas Copco AB)
• Original Assignee: Leybold-Heraeus GmbH & Company KG
• Inventors: Forth, Hans-Joachim, Frank, Rudiger, Bachler, Werner
• Primary Examiner(s): Ostrager, Allen M.
• Application Number:
  US05/793,488
• Time in Patent Office: 538 Days
• Field of Search: 62/55.5, 62/100, 62/268, 55/269, 417/153
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A cryopump having a generally axially symmetrical housing provided at one end with an entrance opening defined by a plane for passage of molecules of the gas to be pumped and plates defining condensation surfaces arranged to be brought to low temperature for condensation of molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, with the condensation surfaces being oriented substantially at right angles to the plane of the entrance opening and the radiation shield being composed of a plurality of elongate metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.

Claims

1. In a cryopump of a housing presenting an entrance opening defined by a plane for passage of molecules of a gas to be pumped, a member arranged to be brought to low temperature and presenting planar condensation surfaces for molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, the improvement wherein said member is positioned so that said condensation surfaces are substantially at right angles to the plane of the entrance opening, and said radiation shield comprises a plurality of elongated metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.

2. An arrangement as defined in claim 1 further comprising means defining a jacket surrounding the condensation surfaces to constitute lateral heat shielding for insulating the condensation surfaces against incident thermal radiation, and wherein said strips are connected directly to said jacket in a manner to create a thermally conductive connection.

3. An arrangement as defined in claim 1 further comprising a cooling head disposed in said housing and connected to in heat conductive communication with said member for cooling said condensation surfaces, and means providing a thermally conductive connection between said cooling head and said metal strips.

4. An arrangement as defined in claim 3 wherein said cooling head is disposed centrally with respect to said condensation surfaces.

5. An arrangement as defined in claim 1 wherein said member comprises two plates which face one another and extend through the pump housing, the surfaces of said plates which face away from one another constituting said condensation surfaces, and said member further comprising adsorption material covering only the surfaces of said plates which face one another.

6. An arrangment as defined in claim 5 further comprising a jacket of circular cross section surrounding the condensation surfaces and delimiting the interior of said housing, and wherein the spacing between said plates is approximately 1/7 the diameter of said jacket.

7. An arrangement as defined in claim 5 wherein each of said plates is composed of two sections.

8. An arrangement as defined in claim 5 further comprising a cooling head provided with a flange and disposed in said housing and connected in heat conductive communication with said member for cooling said condensation surfaces, and means providing a thermally conductive connection between said cooling head and said metal strip, and wherein each of said plates is provided with an angled portion via which it is connected to said flange.

9. An arrangement as defined in claim 1 wherein portions of the interior wall of said housing and of surfaces of said strips which face said condensation surfaces are blackened for reducing reflection of thermal radiation from inside said housing onto said condensation surfaces.