Optical inspection system employing dual path pickup system with single spherical mirror

• US 4,125,317 A
• Filed: 11/26/1977
• Issued: 11/14/1978
• Est. Priority Date: 11/26/1977
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Raber, Peter E., Gordon, Jason M.
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Punter, Wm. H.
• Application Number:
  US05/855,117
• Time in Patent Office: 353 Days
• Field of Search: 356/156, 356/163-166, 250/578, 350/174
• US Class Current: 356/602
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 11/245 using a plurality of fixed, simultaneously operating transducers G01B11/2408 - G01B11/2425, G01B11/255 take precedence
• CPC Class Codes: G01B 5/205 of turbine blades or propellers

Abstract

An optical system having a single spherical mirror for collecting light from two directions combined by a beam splitter after the light has been scattered from the surface of a turbine blade or the like. The spherical mirror is located at an equal optical distance from both the surface of the test specimen and a linear detector array so that it operates at a one-to-one magnification ratio. The linear detector array receives light focused by the mirror along a path folded by the beam splitter. This arrangement is helpful in contouring the surface of a turbine blade near a vertical obstruction such as a shroud of a turbine blade since the collection axes of the pickup legs view the incident spot from different directions. None of the optical elements of the inspection system are located in the plane of movement of the test specimen so that even particularly long items such as a helicopter rotor blade can be contoured. Identical upper and lower optical systems allow both surfaces of the test specimen to be contoured simultaneously. An automatic gain control is provided to adjust the optical modulator so that the effective intensity of the beam incident on the detector array is maintained within predetermined limits.

Claims

1. An optical system for use with apparatus for contouring the surface of a test specimen, comprising:

jig means for moving said test specimen in a plane;

source means for directing a beam of electromagnetic energy along an incident axis toward said test specimen;

main beam splitter means disposed perpendicular to the plane in which said test specimen moves;

secondary beam splitter means having at least two optical members disposed on opposite sides of said incident axis, each collecting scattered electromagnetic energy along a separate axis and redirecting said electromagnetic energy toward said main beam splitter to be combined along a common collecting axis;

spherical mirror means disposed along said collecting axis at an optical distance from surface of the test specimen such that it operates at approximately a one-to-one magnification ratio, for focusing electromagnetic energy impinging thereon; and

means responsive to electromagnetic energy focused by said spherical mirror for indicating contour variations in said test specimen.

2. An optical system according to claim 1, wherein said source means comprises a coherent light source for radiating a beam of electromagnetic energy along an axis skewed to the incident axis, an optical modulator for receiving light from said coherent source and redirecting it along said incident axis in response to a control signal, and a spatial filter means for removing spurious electromagnetic energy from the beam along said incident axis.

3. An optical system according to claim 1, wherein said spatial filter means comprises a first lens disposed to receive energy along the incident axis from said optical modulator, an aperture positioned at the focal point of said first lens and a second lens for receiving electromagnetic energy passing through said aperture and focusing the same on the surface of said test specimen.

4. An optical system according to claim 1, wherein said electromagnetic energy focused by said spherical mirror means is folded by said main beam splitter means and passes through said secondary beam splitter means along an axis toward said means responsive to electromagnetic energy.

5. An optical system according to claim 1, further including an automatic gain control means for receiving a portion of said electromagnetic radiation focused by said spherical mirror for adjusting the effective intensity of the beam on said test specimen.