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Method for coating anti-reflection film on surface of optical material

  • US 4,130,672 A
  • Filed: 09/11/1974
  • Issued: 12/19/1978
  • Est. Priority Date: 10/16/1973
  • Status: Expired due to Term
First Claim
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1. A method for coating an anti-reflection film on the surface of an optical material, comprisinga first step of vacuum-depositing under a first condition of vacuum-deposited a silicon oxide SiO film having a predetermined thickness on said surface of said optical material while said optical material is placed in a vacuum chamber having a first vacuum degree and kept at temperatures below 120°

  • C. at which the quality and the shape of said material are not changed, anda second step of vacuum-depositing under a second condition of vacuum-deposition different from said first condition a silicon dioxide SiO2 film having a predetermined thickness on said SiO film while the temperature of said optical material is kept the same as in said first step but said first vacuum degree is changed to a second vacuum degree different from said first vacuum degree.

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