Frequency adjusting a piezoelectric device by lasering
First Claim
1. A method of adjusting the resonant frequency of a piezoelectric device, which comprises:
- laser machining electrode material from the piezoelectric device to change the resonant frequency of the device to a nominal value; and
simultaneously electronically cleaning the piezoelectric device by overdriving the device at a high current level in comparison to the current level at which the device normally is operated, to prevent lasered particles which cause electrical instability of the device in subsequent operation from accumulating on the device.
1 Assignment
0 Petitions
Accused Products
Abstract
Electrode material is laser machined from a piezoelectric device (10) to adjust its resonant frequency to a nominal value. At the same time the device (10) is electronically cleaned by overdriving the device at a high current level to prevent loosely adhering lasered particles, which cause the device to be electrically unstable, from accumulating on the device. The simultaneous laser machining and electronic cleaning also eliminates erratic resonant frequency changes in the device (10) which occur if the electronic cleaning is performed after the laser machining. As the nominal resonant frequency value is approached, the device (10) is overdriven at successively lower current levels and the laser machining is carried out at respective successively lower rates.
-
Citations
10 Claims
-
1. A method of adjusting the resonant frequency of a piezoelectric device, which comprises:
-
laser machining electrode material from the piezoelectric device to change the resonant frequency of the device to a nominal value; and simultaneously electronically cleaning the piezoelectric device by overdriving the device at a high current level in comparison to the current level at which the device normally is operated, to prevent lasered particles which cause electrical instability of the device in subsequent operation from accumulating on the device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of adjusting the resonant frequency of a piezoelectric device, which comprises:
-
laser machining electrode material from the piezoelectric device to change the resonant frequency of the device to a nominal value; simultaneously with the laser machining of electrode material from the piezoelectric device, electronically cleaning the piezoelectric device by overdriving the device at a high current level in comparison to the current level at which the device is normally operated, to prevent lasered particles which cause electrical instability of the device in subsequent operation from accumulating on the device; reducing the current level at which the piezoelectric device is overdriven in sequential steps as the resonant frequency of the device nears the nominal value, to reduce distortion in the resonant frequency response of the device; and simultaneously with each reducing of the current level at which the piezoelectric device is overdriven, reducing the rate at which the electrode material is laser machined from the device.
-
Specification