Gas encapsulated cooling module
First Claim
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1. A cooling module for integrated circuit chips, said cooling module comprising:
- a multilayer ceramic substrate having a first essentially planar surface and a second essentially planar surface, said multilayer ceramic substrate including an electrical circuit pattern contained therein and on at least one of said planar surface;
a plurality of integrated circuit chips supported on said first planar surface of said substrate and electrically connected to said electrical circuit pattern of said multilayer ceramic substrate, each of said semiconductor chips having an essentially exposed planar surface;
a plurality of electrically conductive connector pins extending from said second planar surface of said substrate, said plurality of electrically conductive pins being electrically connected to said electrical circuit pattern of said substrate;
module cap means hermetically sealed to said substrate to provide a volume encompassing said plurality of chips;
a plurality of bellows like structures, each of said bellows like structures extending from the exposed planar surface of a discrete one of said chips to said module cap means; and
a cooling medium contained within said hermetically sealed volume formed by said substrate and said module cap means.
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Abstract
A gas encapsulated cooling module wherein at least one semiconductor chip to be cooled is supported on a substrate portion of the module the provision of a heat sink stud having a planar surface in thermal contact with a planar surface of the chip to be cooled, said stud being supported by a resilient thermally conductive bellow-like structure, whereby the planar surface of the stud is maintained in intimate thermal contact with the planar surface of the chip.
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Citations
15 Claims
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1. A cooling module for integrated circuit chips, said cooling module comprising:
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a multilayer ceramic substrate having a first essentially planar surface and a second essentially planar surface, said multilayer ceramic substrate including an electrical circuit pattern contained therein and on at least one of said planar surface; a plurality of integrated circuit chips supported on said first planar surface of said substrate and electrically connected to said electrical circuit pattern of said multilayer ceramic substrate, each of said semiconductor chips having an essentially exposed planar surface; a plurality of electrically conductive connector pins extending from said second planar surface of said substrate, said plurality of electrically conductive pins being electrically connected to said electrical circuit pattern of said substrate; module cap means hermetically sealed to said substrate to provide a volume encompassing said plurality of chips; a plurality of bellows like structures, each of said bellows like structures extending from the exposed planar surface of a discrete one of said chips to said module cap means; and a cooling medium contained within said hermetically sealed volume formed by said substrate and said module cap means. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electronic packaging structure for semiconductor integrated circuit chips, said structure having enhanced heat dissipating capability;
- said packaging structure comprising;
a planar structure having first and second surfaces, said planar structure having contacts on said first and second surfaces, said planar structure including electrical conductors electrically interconnecting said contacts in a predetermined manner; a plurality of semiconductor integrated circuit chips disposed on said first surface of said planar structure; connection means electrically connecting each of said chips to selected contacts on said first surface of said planar structure; a plurality of thermally conductive bellows like structures, each of said bellows like structures forming a thermal interface with a discrete one of said plurality of chips, whereby a plurality of paths each having low thermal resistance are provided, each said low resistance path including, in the order recited, a semiconductor chip, a chip/bellows like structure interface and a bellows like structure; and a single heat sink structure thermally coupled to each of said paths having low thermal resistance. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
- said packaging structure comprising;
Specification