Measurement of surface roughness

• US 4,145,140 A
• Filed: 06/15/1977
• Issued: 03/20/1979
• Est. Priority Date: 06/15/1977
• Status: Expired due to Term

• Current Assignee: Hitoshi Fujii
• Original Assignee: Hitoshi Fujii
• Inventors: Fujii, Hitoshi
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Rosenberger, R. A.
• Application Number:
  US05/806,708
• Time in Patent Office: 643 Days
• Field of Search: 356/120, 356/109
• US Class Current: 356/512
• CPC Class Codes: G01B 11/303 using photoelectric detection means

Abstract

A method and apparatus for measuring surface roughness, waviness, cracks or any irregularities or flatnesses in a surface utilizing statistical properties of dichromatic speckle patterns. In practice surface roughness is normally measured utilizing standard profile measuring devices. However, these instruments are not efficient in practice in view of their slowness for effecting measurements. The present invention provides an improved method of measuring surface roughness including the following steps; generating a spatially coherent polychromatic light having at least two wavelengths and directing the light at an optically rough surface in order to illuminate the same; analyzing intensity variations in two speckle patterns formed at a plane due to two wavelengths of the polychromatic light; and defining and evaluating a difference between intensities of the two speckle patterns as a function of surface roughness of the optically rough surface.

Claims

1. A method for measuring surface roughness, surface waviness, surface cracks, or any irregularities or flatnesses in a surface, including the following steps:

generating a spatially coherent polychromatic light having at last two different wavelengths and directing the polychromatic light at an optically rough surface in order to illuminate the same;

analyzing intensity variations in two speckle patterns formed at a light field scattered from the optically rough surface due to the two different wavelengths of the polychromatic light; and

defining and evaluating a difference between intensities of the two speckle patterns as a function of surface roughness of the optically rough surface.

2. A method according to claim 1, wherein dichromatic light is utilized and including the step of varying the wavelengths contained in the dichromatic illuminating light, thereby controlling the effective measuring range of surface roughness which can be evaluated using the method.

3. A method according to claim 2, including the step of defining and evaluating the root mean square (rms) difference between the intensities of the two speckle patterns as a function of the root mean square (rms) of the surface roughness, the rms difference increasing with increasing surface roughness of the optically rough surface.

4. A method according to claim 3, wherein the dichromatic light impinges on the optically rough surface at an incident angle θ

relative to the surface.

5. An apparatus for measuring surface roughness, surface waviness, surface cracks or any irregularities or flatnesses in a surface, the apparatus comprising a laser adapted to generate a spatially coherent polychromatic light having two different wavelengths which is directed at an optically rough surface of an object situated in an object plane;

an aperture placed between the laser and the optically rough surface of the object to be tested, such that the polychromatic light from the laser passes through the aperture and impinges on the optically rough surface;

separate means being provided in a specular direction at a scattered light plane separated from the object plane by a predetermined distance to analyze a dichromatic speckle pattern produced at the plane by light from each of said two different wavelengths scattered from the optically rough surface.

6. An apparatus according to claim 5, wherein the means is situated at a far field diffraction plane and comprises a pinhole located in the diffraction plane for detecting scattered light from the optically rough surface, and said separate means including two photodetectors utilized to analyze the dichromatic speckle pattern, relative movement between the optically rough surface and the apparatus resulting in two intensities being detected by the two photodetectors and their differences being varied in time, signals generated by their photodetectors being fed into an analyzing circuit which is provided to calculate the average difference between the two wavelengths.

7. An apparatus according to claim 6, wherein light generated by the laser impinges on the optically rough surface at an incident angle θ

, and the aperture has a width 2a.

8. An apparatus according to claim 6 together with a concave grating situated on a side of the pinhole opposite from the optically rough surface.

9. An apparatus according to claim 5, wherein light generated by the laser impinges on the optically rough surface at an incident angle θ

, and the aperture has a width 2a.