Apparatus and method for measuring pressures and indicating leaks with optical analysis

• US 4,147,431 A
• Filed: 01/25/1978
• Issued: 04/03/1979
• Est. Priority Date: 04/26/1976
• Status: Expired due to Term

• Current Assignee: Varian Associates, Inc. (Siemens AG)
• Original Assignee: Varian Associates, Inc. (Siemens AG)
• Inventors: Mann, Joseph K.
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Punter, Wm. H.
• Application Number:
  US05/872,209
• Time in Patent Office: 433 Days
• Field of Search: 356/72, 356/85-87, 356/187, 324/33, 73/40.7, 73/705, 73/753, 250/310, 250/363 R, 250/458-459, 23/230 L
• US Class Current: 356/72
• CPC Class Codes: G01L 11/02 by optical means
• CPC Class Codes: G01M 3/38 by using light G01M3/02 takes precedence
• CPC Class Codes: G01M 3/40 by using electric means, e.g. by observing electric discharges
• CPC Class Codes: G01N 21/69 specially adapted for fluids , e.g. molten metal

Abstract

A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which depostion rate is determined. In combination with techniques for achieving high differential sensitivity to iluctuations in light output from a selected spectral line, a novel leak detector is achieved. In combination with an optically dispersive element a residual gas analyzer is obtained.

Claims

1. Apparatus for deriving a partial pressure signal and for deriving a total pressure signal correlated with said partial pressure signal, comprising:

means to ionize and to excite light emission from residual gas within said apparatus;

spectral discrimination means coupled to said light whereby a portion of said emitted light is selected for transmission by said spectral discrimination means, said portion being characteristic of a selected gas;

means responsive to the total pressure of said residual gas including electrode means for the collection of currents of said ions and first output means for indicating the magnitude of said ion currents;

means responsive to the partial pressure of a selected gas including optical detection means whereby an electrical signal responsive to the intensity of said spectrally selected portion of emitted light is derived, and second output means for indicating the magnitude of said optically detected signal; and

means responsive to the relative magnitude of said partial pressure output and said total pressure output whereby a relative magnitude signal is derived.

2. The combination of claim 1 wherein a relationship expressive of said relative magnitude is a function of the ratio of said first and second outputs.

3. The combination of claim 1 wherein the relationship expressive of said relative magnitude is the difference.

4. The combination of claim 2 wherein the function of said outputs is said logarithm of the ratio.

5. The apparatus of claim 1 wherein said means to excite light comprises:

cathode and anode means;

means for energizing said cathode and anode means for providing an electric field therebetween; and

constraint means whereby electrons in said field execute non-linear trajectories within the volume defined by said constraint means.

6. The partial pressure gauge of claim 5 wherein said constraint means comprises magnetic field means.

7. The partial pressure gauge of claim 5 wherein said constraint means comprises electric field means.

8. The partial pressure gauge of claim 1 wherein said means responsive to said optically derived signal further includes means for adding a bias signal to said optically derived signal whereby a null signal may be obtained from said addition.

9. The partial pressure gauge of claim 1 wherein the excitation means further includes modulation means whereby a periodic time dependence is impressed upon the intensity of said emitted light and,

said means responsive to said optically derived signal includes amplification means and phase sensitive detection means whereby the output signal derived from said responsive means is limited to a selected phase relationship with said modulation means.

10. The partial pressure gauge of claim 9 wherein the phase relationship is a phase difference equal to pi radians and the output signal is a null signal.

11. The partial pressure gauge of claim 9 wherein said phase relationship is a phase difference of 2 pi radians and said output signal is proportional to the time average of said emitted light portion.

12. The partial pressure gauge of claim 1 further including optical transmission means whereby said optical detection means is disposed away from said excitation means to minimize stray fields.

13. The partial pressure gauge of claim 1 wherein said optical detection means includes a photomultiplier tube and means for energizing said tube.

14. Apparatus for deriving a partial pressure signal and for deriving a total pressure signal correlated with said partical pressure signal, comprising:

means to ionize and to excite light emission from residual gas within said apparatus;

spectral discrimination means coupled to said light whereby a portion of said emitted light is selected for transmission by said spectral discrimination means, said portion being characteristic of a selected gas;

means responsive to the total pressure of said residual gas including electrode means for the collection of currents of said ions and first output means for indicating the magnitude of said ion currents; and

means responsive to the partial pressure of a selected gas including optical detection means whereby an electrical signal responsive to the intensity of said spectrally selected portion of emitted light is derived, and second output means for indicating the magnitude of said optically detected signal.

15. A method for analyzing gas in a vacuum enclosure, comprising the steps of:

exciting gas atoms to cause a gaseous discharge phenomena;

deriving a first signal from the de-excitation of gas atoms from said gaseous discharge representative of the partial pressure of a selected gas in said enclosure;

deriving a second signal proportional to said step of exciting gas atoms said second signal representative of the total pressure in said enclosure, whereby said second signal is causatively related to said gaseous discharge and said first and second signals are causally correlated; and

comparing said first and second signals to obtain the relative magnitude thereof.

16. The method of claim 15 wherein said selected gas is nitrogen.

17. Apparatus for deriving and interrelating a partial pressure signal and a total pressure signal comprising:

means to excite light emitting quantum levels of quantum systems of gas within said apparatus, said means generating a signal indicative of the extent of said excitation;

spectral discrimination means coupled to said light whereby a portion of said emitted light is selected for transmission by said spectral discrimination means, said portion being characteristic of a selected gas;

means indicative of the total pressure of said gas to provide a signal representative of said total pressure and first output means for indicating the magnitude of said total pressure signal said means responsive to said signal generated by said light exciting means;

means responsive to the partial pressure of a selected gas including optical detection means whereby a signal responsive to the intensity of said spectrally selected portion of emitted light is derived, and second output means for indicating the magnitude of said optically detected signal; and

means responsive to the relative magnitude of said partial pressure output and said total pressure output whereby a relative magnitude signal is derived.

18. Apparatus for deriving and interrelating a partial pressure signal and a total pressure signal comprising:

means to excite light emitting quantum levels of quantum systems of gas within said apparatus, said means generating a signal indicative of the extent of said excitation;

spectral discrimination means coupled to said light whereby a portion of said emitted light is selected for transmission by said spectral discrimination means, said portion being characteristic of a selected gas;

means indicative of the total pressure of said gas to provide a signal representative of said total pressure, said means responsive to said signal generated by said light exciting means;

means responsive to the partial pressure of a selected gas including optical detection means whereby a signal responsive to the intensity of said spectrally selected portion of emitted light is derived;

means responsive to the relative magnitude of said partial pressure output and said total pressure output whereby a relative magnitude signal is derived;

indicating means for indicating the magnitude of a selected one of said total pressure signal, partial pressure signal or relative magnitude signal; and

switching means for selectably connected one of said signals to said indicating means.

19. Apparatus for deriving a partial pressure signal, a total pressure signal, relationship of said total pressure signal with said partial pressure signal comprising:

means to ionize and to excite light emission from residual gas within said apparatus, a portion of said quantum systems being ionized by said excitation means;

spectral discrimination means coupled to said light whereby a portion of said emitted light is selected for transmission by said spectral discrimination means, said portion being characteristic of a selected gas;

means responsive to the total pressure of said residual gas including electrode means for the collection of currents of said ions;

means responsive to the partial pressure of a selected gas including optical detection means whereby an electrical signal responsive to the intensity of said spectrally selected portion of emitted light is derived;

switching means for selecting one of said total pressure signal, said partial pressure signal or said relative magnitude signal; and

output means for indicating the magnitude of said selected signal.

20. The combination of claim 19 wherein the relationship expressive of said relative magnitude is a function of a ratio of said first and second outputs.

21. The combination of claim 19 wherein the relationship expressive of said relative magnitude is the difference.

22. The combination of claim 20 wherein the function of said outputs is the logarithm of said ratio.

23. The appratus of claim 19 wherein said means to ionize and excite light comprises:

cathode and anode means;

means for energizing said cathode and anode means for providing an electric field therebetween; and

constraint means whereby electrons in said field execute non-linear trajectories within the volume defined by said constraint means.

24. The partial pressure gauge of claim 23 wherein said constraint means conprises magnetic field means.

25. The partial pressure gauge of claim 23 wherein said constraint means comprises electric field means.

26. The partial pressure gauge of claim 19 wherein said means responsive to said optically derived signal further includes means for adding a bias signal to said optically derived signal whereby a null signal may be obtained from said addition.

27. The partial pressure gauge of claim 19 wherein the excitation means further includes modulation means whereby a periodic time dependence is impressed upon the intensity of said emitted light and, said means responsive to said optically derived signal includes amplification means and phase sensitive detection means whereby the output signal derived from said responsive means is limited to a selected phase relationship with said modulation means.

28. The partial pressure gauge of claim 27 wherein the phase relationship is a phase difference equal to pi radians and the output signal is a null signal.

29. The partial pressure gauge of claim 27 wherein said phase relationship is a phase difference of 2 pi radians and said output signal is proportional to the time average of said emitted light portion.

30. The partial pressure gauge of claim 19 further including optical transmission means whereby said optical detection means is disposed away from said excitation means to minimize stray fields.