Optimized spatial filter for defect detection

• US 4,153,336 A
• Filed: 12/21/1976
• Issued: 05/08/1979
• Est. Priority Date: 12/22/1975
• Status: Expired due to Term

• Current Assignee: Tokyo Shibaura Electric Co., Ltd. (Toshiba Corporation)
• Original Assignee: Tokyo Shibaura Electric Co., Ltd. (Toshiba Corporation)
• Inventors: Sekizawa, Hidekazu, Minami, Masana
• Primary Examiner(s): Stern, Ronald J.
• Application Number:
  US05/752,984
• Time in Patent Office: 868 Days
• Field of Search: 350/162 SF, 356/239, 356/237, 356/71
• US Class Current: 349/17
• CPC Class Codes: G01B 11/2433 for measuring outlines by shadow casting
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

An apparatus for detecting the defects composed of non-linear components of a subject pattern, includes a laser source for illuminating the subject pattern by a laser beam, a Fourier-transform lens for projecting an information light from the pattern through a spatial filter onto a screen. The filter is placed on the Fourier-transform plane of the Fourier-transformed information light for intercepting the coherent light having information of the linear components, the filter having arm sections extending correspondingly to the linear components of said normal pattern, the outer periphery of said arm sections including curved sections protruding toward the intersecting point of the arms.

Claims

1. An apparatus for detecting defects in a pattern having linear straight line features and nonlinear defects comprising:

(a) a coherent light source for radiating a coherent light;

(b) a collimator for collimating the coherent light radiated from said coherent light source into a light beam with a predetermined diameter and leading it to said pattern;

(c) a transform lens for transforming the intensity distribution of transmitted or reflected light from said pattern into a Fourier-transformed pattern; and

(d) a spatial filter placed on the Fourier-transform plane of said transform lens and preventing transmission of the coherent light having information of said linear straight line features of said pattern, said filter having a light intercepting area defined by a plurality of arm sections extending in the horizontal and vertical directions from a common point of intersection correspondingly to the linear straight line features of said subject pattern, a portion lying between two adjacent arms being of a hyperbola-shape protruding toward the center of said filter wherein the coherent light intercepting area of said spatial filter is defined according to

space="preserve" listing-type="equation">(|X|-A)(|Y|-A)≦

B.sup.2

where X and Y indicate the X-axis and Y-axis of said filter respectively, said X- and Y-axes corresponding to the respective axes of the arms of said filter extending in the horizontal and vertical directions, X=Y=0 is indicative of the center of said filter, and both A and B are positive constants, wherein said constants A and B are given as values complying with

space="preserve" listing-type="equation">A×

B≃

1/64 L

where L is the side length of an effective pupil or the diameter of an effective pupil of said spatial filter.

2. An apparatus according to claim 1 wherein said constants A and B are given substantially at 7/64 L and at 9/64 L to 7/64 L, respectively.

3. An apparatus according to claim 1 wherein said spatial filter comprises a gelatin filter.

4. An apparatus according to claim 1 which further comprises an incoherent light source radiating incoherent light and means for leading the incoherent light from the light source to said pattern in compliance with the optical axis of said coherent light.

5. An apparatus according to claim 4 wherein said coherent light source is a Helium-Neon laser and said incoherent light source is an incandescent lamp.

6. An apparatus according to claim 5 which further comprises a color filter located across the optical path of the incoherent light radiated from said incoherent light source.

7. An apparatus according to claim 6 wherein said color filter is a blue or green gelatin filter.

8. An apparatus according to claim 1 which further comprises control means for intermittently blocking the coherent light radiated from said coherent light source.

9. An apparatus according to claim 8 wherein said control means includes a beam splitter with a plurality of holes spaced subsequently to said coherent light source and driving means for rotating said splitter.

10. An apparatus according to claim 8 wherein said control means includes a liquid crystal plate placed subsequently to said coherent light source, a lens system for collimating the coherent light transmitted through said liquid crystal plate, and a plate with a pinhole arranged in said lens system.