Microinterferometer transducer

• US 4,153,370 A
• Filed: 12/05/1977
• Issued: 05/08/1979
• Est. Priority Date: 12/05/1977
• Status: Expired due to Term

• Current Assignee: United States Department of Energy
• Original Assignee: United States Department of Energy
• Inventors: Corey, Harry S. III
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US05/857,650
• Time in Patent Office: 519 Days
• Field of Search: 356/106 R, 356/109, 356/110, 356/113, 33/125 A, 33/DIG. 4, 33/DIG. 5, 33/DIG. 21
• US Class Current: 356/498
• CPC Class Codes: G01B 11/007 feeler heads therefor
• CPC Class Codes: G01B 5/012 Contact-making feeler heads therefor
• CPC Class Codes: G01B 9/0205 of probe head

Abstract

An air-bearing microinterferometer transducer is provided for increased accuracy, range and linearity over conventional displacement transducers. A microinterferometer system is housed within a small compartment of an air-bearing displacement transducer housing. A movable cube corner reflector of the interferometer is mounted to move with the displacement gauging probe of the transducer. The probe is disposed for axial displacement by means of an air-bearing. Light from a single frequency laser is directed into an interferometer system within the transducer housing by means of a self-focusing fiber optic cable to maintain light coherency. Separate fringe patterns are monitored by a pair of fiber optic cables which transmit the patterns to a detecting system. The detecting system includes a bidirectional counter which counts the light pattern fringes according to the direction of movement of the probe during a displacement gauging operation.

Claims

1. A microinterferometer displacement transducer, comprising:

a longitudinally extending housing an opening extending therein toward a back portion of said housing;

a cylindrical gas bearing disposed in said opening and forming a chamber in said housing between said bearing and said back portion of sais housing;

3. The displacement transducer as set forth in claim 1 further including a vacuum retractor means for applying a vacuum to the chamber of said housing to retract said gauge probe.

5. The displacement transducer as set forth in claim 3 wherein said laser beam source includes a Helium Neon laser and means for focusing and directing said laser beam into the remote end of said self-focusing fiber-optic cable.

2. a longitudinally extending gauge probe disposed for longitudinal displacement coaxially in said bearing and extending without said housing to contact a surface to be engaged;

means for supplying a pressurized gas to said air-bearing;

a microinterferometer disposed within said chamber of said housing including a beam-divider cube, a fixed-cube-corner reflector and a movable cube-corner reflector mounted to move with said gauge probe, said fixed-cube-corner reflector and said movable cube-corner reflector mounted so that a laser beam directed into said beam-divider cube at a first point is divided to direct a first portion of said beam to said fixed-cube-corner reflector, the reflected first and second beam portions are directed to interferingly intersect at a second point in said beam-divider cube to form interference fringe patterns as said movable cube-corner reflector is moved by said probe in a gauging operation and divide said fringe patterns into first and second fields of view;

a remote single frequency laser beam source;

a self-focusing fiber-optic cable disposed for coherently transmitting said laser beam from said remote laser beam source into said housing and terminally mounted within said housing to provide said laser beam directed into said beam-divider cube at said first point;

first and second fiber-optic output cables mounted in said first and second fields of view of said fringe patterns, respectively, for transmitting said fringe patterns from said housing;

a quarter-wave plate mounted in the second field of view of said fringe patterns between said beam-divider cube and said second output cable is phase shifted one-quarter wave length from the pattern transmitted by said first output cable and;

means responsive to the fringe patterns transmitted by said first and second output cables for determining the magnitude and direction of displacement of said probe.

4. The displacement transducer as set forth in claim 2 wherein said means for determining the magnitude and direction of displacement of said probe includes first and second remote photo-detectors connected to said first and second fiber-optic cables, respectively. for detecting said fringe patterns and generating ac signals at respective outputs in response to each fringed increment of displacement of said probe, a phase detector having first and second inputs connected to the outputs of said first and second photo detectors, respectively, for generating an output count pulse at an up line output when the signal from said first photodetector leads the signal from said second photo detector indicating a fringe increment of movement in a forward direction and generating an output count pulse at a down line output when the signal from said second photo-detector leads the signal from said first photo-detector indicating a fringe increment of movement in the reverse direction, and a bidirectional display counter having up and down count inputs connected to said up and down count line outputs, respectively, of said phase detector.